Segmented Magnetron Sputtering Target for Alloy Composition Control
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Solution Overview
Problem
Existing methods for achieving specific alloy compositions in thin layers via cathode sputtering are inflexible and costly, particularly when dealing with materials like PtMn, as the alloy composition can change during deposition, making it difficult to determine the optimal target composition and achieve homogeneous layers on large substrates.
Innovation Solution
A magnetron sputtering method using a target with multiple sections of different materials, where the erosion section is positioned and tilted relative to the material boundary to control the alloy ratio and create gradients, allowing for adjustable alloy composition and gradient formation on the substrate.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If multiple sputter targets with different alloy compositions are used to achieve specific alloy compositions, then the desired alloy composition can be obtained, but the cost increases significantly and the process becomes complex
Solution Approach 1:
The target surface is divided into multiple sections, each made of different materials. By selectively sputtering from different sections of the same target, various alloy compositions can be achieved without needing multiple separate targets. The erosion section is positioned to cover specific portions of the segmented target surface, enabling controlled material removal from designated areas.
Solution Approach 2:
The invention introduces spatial positioning of the erosion section relative to the target surface as a new degree of freedom. By adjusting the position, orientation, and tilt angle of the erosion section, different ratios of materials from various target sections can be sputtered simultaneously, enabling continuous variation of alloy composition from a single target.
2Manufacturing precision
If multiple sputter targets are used to adjust alloy composition, then the desired composition can be achieved, but the time required for series tests and target replacement increases
Solution Approach 1:
A single target with multiple material sections serves multiple functions that previously required several separate targets. The same target can produce different alloy compositions by simply repositioning or reorienting the erosion section, eliminating the need for repeated target installations and series tests with different targets.
Solution Approach 2:
The erosion section is made dynamically adjustable relative to the target surface through positioning and tilting mechanisms. This dynamic reconfiguration allows the system to adapt to different alloy composition requirements without physical target changes, enabling rapid experimentation and optimization.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables precise control over alloy composition and gradient formation on the substrate, reducing the need for multiple targets and improving homogeneity and cost-effectiveness by adjusting the position and angle of the magnet arrangement during the sputtering process.
Implementation Method 1
one behind as seen from the substrate to be coated the target arranged magnetron magnet assembly
Implementation Method 2
coating a substrate with an alloy by means of cathode sputtering
Data Source
Figure 1a~1b
Figure 2a~2c
Figure 3a~3b
AI summary
The invention relates to a target for coating a substrate with an alloy by means of cathode sputtering, said alloy having at least one first material and one second material as alloy components. The surface of the target has at least one first section made of the first material and one second section made of the second material. The two sections adjoin each other and form a common boundary line. The invention further relates to a device and method for coating a substrate with an alloy by means of cathode sputtering using the target according to the invention.