Segmented MEMS Diaphragm for Hermetic Sealing Stability
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Solution Overview
Problem
Existing MEMS pressure sensors with solid ground walls face limitations in manufacturing flexibility and hermetic sealing stability, particularly in accommodating various diaphragm shapes and maintaining stability against outgassing and temperature changes.
Innovation Solution
A MEMS sensor design featuring a diaphragm with a base surface area divided into multiple subareas separated by a peripheral wall structure, including fluid through-openings for improved flexibility and hermetic sealing, which allows for the use of a larger back volume and enhanced stability.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of manufacture
If a solid ground wall structure is used in MEMS pressure sensors, then structural support is provided, but manufacturing flexibility for various diaphragm shapes is reduced
Solution Approach 1:
The diaphragm base surface area is divided into multiple subareas (first, second, third subareas) that are separated from each other. This segmentation allows each subarea to be independently designed and manufactured with different shapes and functions, significantly increasing manufacturing flexibility while maintaining structural integrity through the separating structure.
Solution Approach 2:
The patent introduces a vertical dimension by creating a separating structure that extends from the base surface into the diaphragm thickness direction. This三维 approach allows the separating structure to include fluid through-openings that pass through the diaphragm, enabling complex fluid communication pathways without complicating the planar manufacturing process.
2Reliability
If a larger back volume is used in the hermetically sealed gap, then stability against temperature changes is improved, but outgassing issues worsen
Solution Approach 1:
The separating structure creates localized regions with different properties. The fluid through-openings in the separating structure allow selective fluid communication between subareas while maintaining hermetic sealing in other regions. This local differentiation enables the system to benefit from larger back volume for thermal stability while managing outgassing through controlled fluid pathways.
Solution Approach 2:
The separating structure acts as an intermediary element between the different subareas. It provides controlled fluid communication through the through-openings while maintaining the hermetic seal of the overall structure. This intermediary structure allows the system to achieve both larger back volume for stability and controlled outgassing management.
3Ease of manufacture
If multiple diaphragm subareas are created on a large surface, then manufacturing cost is reduced, but structural complexity increases
Solution Approach 1:
The diaphragm is segmented into multiple subareas that can be independently manufactured and then integrated. This segmentation allows for simplified manufacturing of each individual subarea on large surfaces, reducing overall manufacturing cost while the modular nature of the segmented structure actually simplifies rather than complicates the overall device architecture.
Data Source
AI summary
A MEMS sensor including a diaphragm, a base surface area of the diaphragm being delimited with the aid of a peripheral wall structure, and the base surface area including at least two subareas, of which at least one of the subareas is deflectably situated, and the at least two subareas being separated from one another with the aid of at least one separating structure or being delimited by the latter. The separating structure includes at least one fluid through-opening for the passage of fluid.