Segmented N-well Tap for High Voltage Breakdown

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Solution Overview

Problem

Existing semiconductor structures, particularly CMOS devices, face limitations in breakdown voltage, leading to junction breakdown when biased at high voltages, necessitating an increase in breakdown voltage without increasing silicon area usage.

Innovation Solution

The p-n junction is repositioned to be under the active area of the tap, with a more heavily doped region serving as an ohmic contact and a lightly doped region providing isolation, decoupling breakdown voltage from the isolation area, allowing for optimization of implantation for increased n-channel isolation without affecting the N-well breakdown voltage.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Area of stationary object

If the N-well tap is formed close to the edge of the well, then the silicon area usage is minimized, but the breakdown voltage decreases causing junction breakdown at high voltages

Engineering Contradiction:
Improvesilicon area usageVSAvoidbreakdown voltage
Core Design Contradiction:
Area of stationary objectVSReliability

Solution Approach 1:

The tap structure is segmented into multiple regions with different doping concentrations (heavily doped N+ region and lightly doped N- region). This segmentation allows the heavily doped region to provide low resistance contact while the lightly doped region extends the depletion region and increases breakdown voltage, resolving the contradiction between area efficiency and high voltage capability

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Different regions of the tap are assigned different doping qualities - the region closer to the well edge uses heavy doping for low resistance, while the region extending toward the isolation area uses light doping for high breakdown voltage. This local quality differentiation allows simultaneous optimization of both area usage and breakdown voltage

Inventive Principle:
Principle #3Local quality

2Loss of energy

If the tap is heavily doped to reduce resistance, then the contact resistance decreases, but the breakdown voltage at the p-n junction interface with isolation area decreases

Engineering Contradiction:
Improvecontact resistanceVSAvoidbreakdown voltage
Core Design Contradiction:
Loss of energyVSReliability

Solution Approach 1:

The tap is divided into a heavily doped N+ region for low resistance contact and a lightly doped N- region for high breakdown voltage. This segmentation allows each region to optimize its doping level for its specific function, eliminating the need to choose between low resistance and high breakdown voltage

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The doping concentration varies locally within the tap structure - heavy doping near the contact point minimizes resistance, while light doping near the isolation area interface maximizes breakdown voltage. This local quality gradient resolves the contradiction between resistance loss and reliability

Inventive Principle:
Principle #3Local quality

3Area of stationary object

If the isolation area is positioned closer to the tap, then the device area is reduced, but the p-n junction breaks down at the interface under high voltage bias

Engineering Contradiction:
Improvedevice areaVSAvoidjunction breakdown voltage
Core Design Contradiction:
Area of stationary objectVSReliability

Solution Approach 1:

The tap structure segments the current path through different doping regions, allowing the isolation area to be positioned closer to the tap while maintaining high breakdown voltage. The lightly doped N- region acts as a buffer that prevents premature breakdown at the isolation area interface

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The solution moves the breakdown voltage enhancement from the lateral dimension (distance to isolation area) to the vertical dimension (doping concentration gradient within the tap). This allows area reduction while maintaining reliability through controlled doping profiles rather than increased spacing

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration increases breakdown voltage while maintaining the same silicon area usage as prior art devices, optimizing n-channel isolation and preventing junction breakdown at higher voltages.

Implementation Method 1

A p-type isolation area can be formed in the semiconductor material that forms the bottom surface of a trench between two taps. The isolation area can provide isolation between neighboring n-channel devices.

Methodology Applied
Scientific EffectElectrical isolation: Electrical Resistance

Implementation Method 2

a more heavily doped region serving as an ohmic contact

Methodology Applied
Scientific EffectOhmic contact: Conduction (electrical)

Implementation Method 3

When a voltage is applied to the N-well contact that is greater than the designed breakdown voltage for the device, the p-n junction breaks down at the interface of the p-n junction with the isolation area.

Methodology Applied
Scientific EffectJunction breakdown: Avalanche Breakdown

Data Source

PatentUS11037928B2Methods and apparatuses including an active area of a tap intersected by a boundary of a well
Publication Date: 2021.06.15 MICRON TECHNOLOGY INC
  • US11037928B2 patent drawing
  • US11037928B2 patent drawing
  • US11037928B2 patent drawing

AI summary

Apparatuses and methods are disclosed. One such apparatus includes a well having a first type of conductivity formed within a semiconductor structure having a second type of conductivity. A boundary of the well intersects an active area of a tap to the well.