Segmented Optical Component for FEL Dose Stability
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Solution Overview
Problem
Free electron lasers (FELs) used in projection exposure systems experience intensity profile fluctuations, leading to dose fluctuations in individual scanners, which affect the uniformity and stability of illumination.
Innovation Solution
An optical component with separate radiation-reflecting regions is designed to divide a collective output beam into individual output beams, where regions within each group guide different partial beams to the same scanner, allowing for variation in the division ratio of the collective output beam's intensity, thereby reducing dose fluctuations. This component is optimized based on the geometrical beam properties and fluctuations of the FEL, ensuring minimal achievable dose fluctuations.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a collective output beam is divided into individual output beams using a single radiation-reflecting region, then the device structure is simple, but dose fluctuations occur due to intensity profile variations of the FEL
Solution Approach 1:
The radiation-reflecting region is divided into multiple separate sub-regions (first, second, third sub-regions), each reflecting a portion of the collective output beam to form different individual output beams. This segmentation allows independent control of beam portions to compensate for intensity fluctuations, thereby reducing dose variations while maintaining a manageable structural complexity
Solution Approach 2:
Different sub-regions of the radiation-reflecting element are designed with different geometrical properties (sizes, positions, orientations) to reflect different portions of the collective beam with specific characteristics. This local differentiation enables precise control over the intensity distribution of individual output beams to achieve dose stability
2Stability of the object's composition
If the division ratio of the collective output beam is fixed, then the optical component structure is simple, but the illumination uniformity across scanners deteriorates due to FEL intensity fluctuations
Solution Approach 1:
The optical component design incorporates the ability to vary the division ratio dynamically by adjusting the geometrical parameters of the radiation-reflecting sub-regions. This dynamic capability allows the system to adapt to FEL intensity fluctuations and maintain uniform illumination across multiple scanners, while the overall structure remains based on a relatively simple segmented mirror configuration
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The optical component effectively reduces and stabilizes dose fluctuations in individual scanners by compensating for fluctuations in the FEL's intensity profile, ensuring uniform illumination across all scanners, even with predefined maximum divergence and pointing fluctuations.
Implementation Method 1
The optical component includes a plurality of separate radiation-reflecting regions grouped so that regions of the same group serve for guiding the different partial beams of one of the individual output beam to the same scanner
Data Source
AI summary
An optical component for coupling out an individual output beam from a collective output beam includes a plurality of radiation-reflecting regions which are grouped in such a way that regions of the same group serve for guiding different partial beams of the individual output beam to the same scanner.