Segmented Optical Unit Layout for Wide-Area Laser Crystallization
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Solution Overview
Problem
The challenge is to develop a laser crystallization apparatus that can irradiate a laser beam over a large area without increasing manufacturing costs, particularly as glass substrates for display devices become larger, requiring efficient coverage without escalating costs.
Innovation Solution
The apparatus incorporates an optical unit with bonded portions of different lengths and widths, arranged to form specific angles and offsets, allowing for even distribution of the laser beam across a wide area using multiple sub-optical units, which are bonded through optical contact or welding, enabling efficient irradiation without the need for larger monolithic parts.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Area of stationary object
If a single large optical unit is used to irradiate laser beam over wide area, then the coverage area is increased, but the manufacturing cost increases
Solution Approach 1:
The optical unit is divided into multiple sub-optical units (first sub-optical unit, second sub-optical unit, etc.) that are arranged in sequence along the laser beam incident direction. Each sub-optical unit has bonded portions with different lengths and widths that are bonded to each other, creating a segmented structure that covers a wide area while using smaller, more cost-effective components rather than a single large optical unit.
2Area of stationary object
If multiple sub-optical units are arranged to cover large area, then the coverage area is increased, but the laser beam intensity uniformity deteriorates
Solution Approach 1:
Each sub-optical unit has bonded portions with specifically designed different lengths and widths, creating local variations in the optical path. The bonded portions are arranged with specific offset distances from each other, and the optical unit includes a diffuse reflection plate that strategically scatters light at different locations. This local quality variation compensates for intensity differences caused by the segmented structure, maintaining overall uniformity across the large coverage area.
Solution Approach 2:
A diffuse reflection plate is introduced as an intermediary element within the optical unit. This plate strategically scatters and redistributes the laser beam intensity across different regions, compensating for the non-uniform distribution that would otherwise result from the segmented sub-optical units. The diffuse reflection plate acts as a mediator that balances the optical path differences between various bonded portions.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration allows for effective laser beam irradiation across large areas without increasing manufacturing costs, ensuring uniformity and reducing intensity variations, thus facilitating the crystallization process for display devices.
Implementation Method 1
The first portion and the second portion may be bonded by optical contact bonding or welding.
Implementation Method 2
an optical unit to which the laser beam is incident in an incident direction
Implementation Method 3
a first width of the first portion and a second width of the second portion are the same as each other on the bonded surface based on a direction parallel to the incident direction of the laser beam. Based on a direction perpendicular to the incident direction of the laser beam, the first length of the first portion and the second length of the second portion may be different from each other.
Data Source
AI summary
A laser crystallization apparatus according to an embodiment includes a light source unit irradiating a laser beam; and an optical unit to which the laser beam is incident, wherein the optical unit includes a first portion and a second portion bonded to each other on a bonded surface, and a first width of the first portion and a second width of the second portion are the same as each other on the bonded surface based on a direction parallel to the incident direction of the laser beam.