Segmented Pellicle Frame for Photomask Deformation Control
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Solution Overview
Problem
The existing pellicle frames used in semiconductor and display panel manufacturing cause deformation in photomasks due to their rigidity and shape, leading to quality issues, and reducing their rigidity or height compromises the stand-off distance and introduces foreign material risks.
Innovation Solution
A pellicle frame with a mask-bonding agglutinant layer divided into segments, where the spaces between these segments are filled with a non-adhesive resilient material, reducing the deformation impact on the photomask by moderating the bonding power and maintaining a suitable stand-off distance.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Stability of the object's composition
If the pellicle frame is made rigid to maintain structural stability during manufacturing and handling, then the frame can maintain its shape and facilitate manufacturing, but the photomask undergoes deformation when adhered to the pellicle frame
Solution Approach 1:
The agglutinant layer is divided into multiple segments rather than being continuous, creating a segmented bonding structure that reduces the overall bonding power and allows the frame to adapt to photomask shape variations without causing deformation
Solution Approach 2:
Different regions of the pellicle frame have different properties: the agglutinant layer segments provide localized bonding in specific areas while leaving other regions free to deform, creating a non-uniform bonding distribution that reduces overall deformation impact
2Manufacturing precision
If the rigidity of the pellicle frame is reduced to reduce deformation impact on the photomask, then the frame can better conform to the photomask shape, but the frame becomes difficult to manufacture and handle
Solution Approach 1:
By segmenting the agglutinant layer, the frame maintains its overall rigid structure for easy manufacturing and handling, while the segmented bonding areas provide localized flexibility to conform to photomask shape without requiring the entire frame to be made less rigid
3Manufacturing precision
If the height of the pellicle frame is reduced to reduce deformation impact, then the frame can better fit the photomask shape, but the stand-off distance between the pellicle membrane and photomask becomes insufficient
Solution Approach 1:
The segmented agglutinant layer allows the frame to have sufficient height for maintaining stand-off distance while the segments themselves can deform locally to reduce deformation impact, separating the functions of height maintenance and deformation reduction
4Manufacturing precision
If the cross sectional area of the frame bar is reduced to reduce rigidity, then the frame can better conform to the photomask shape, but foreign materials can enter through the inner wall grooves
Solution Approach 1:
Segmenting the agglutinant layer reduces rigidity and improves conformance to photomask shape without requiring grooves or complex frame modifications that could trap foreign materials, providing a cleaner solution
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration significantly reduces photomask deformation during adhesion, maintains a high stand-off distance, and prevents foreign particle entry, enhancing the reliability and quality of the manufacturing process.
Implementation Method 1
the spaces between which are entirely filled with a non-adhesive resilient body layer
Data Source
Figure 1
Figure 2(a)~2(d)
AI summary
A pellicle is proposed in which a mask-bonding agglutinant layer, that bonds the pellicle to a photomask, is divided into segments, and the vacancies thus created between these segments are entirely occupied by segments of a non-resilient body layer, and these alternately arranged segments are flush with each other.