Segmented Piezoelectric Actuator Electrodes for Breakdown Isolation
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Solution Overview
Problem
Piezoelectric actuators in light deflectors often experience breakdowns due to defects in the piezoelectric layer, leading to functional loss and propagation of the breakdown to surrounding areas, causing chain reactions and inconvenience in power feeding.
Innovation Solution
The upper electrode layer is configured into multiple segments in both longitudinal and lateral directions with connection wires, allowing for controlled propagation of high currents and preventing short circuits, while the piezoelectric layer is also segmented to restrict current propagation, and the power feeding layer is designed to distribute voltage efficiently.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If the upper electrode layer is configured as a single continuous layer, then the structure is simple and easy to manufacture, but breakdown propagation spreads rapidly to surrounding areas causing extensive functional loss
Solution Approach 1:
The upper electrode layer is divided into multiple independent electrode segments separated by insulating layers. This segmentation prevents breakdown propagation between segments, as the insulating layers act as barriers to current flow. Each segment can be independently controlled, and breakdown in one segment does not affect other segments, thus improving reliability without excessive complexity.
2Reliability
If the piezoelectric layer is segmented to restrict current propagation, then breakdown propagation is limited, but the device structure becomes more complex and manufacturing difficulty increases
Solution Approach 1:
The piezoelectric layer is segmented into multiple piezoelectric segments corresponding to the electrode segments above. Each piezoelectric segment is separated by insulating layers that prevent current propagation during breakdown events. This segmentation limits functional loss to only the affected segment while maintaining manufacturing feasibility through standardized layering processes.
3Use of energy by moving object
If connection wires are used to connect electrode segments, then power can be distributed to all segments, but the risk of short circuits and breakdown propagation through wires increases
Solution Approach 1:
Insulating layers serve as intermediaries between adjacent electrode segments and piezoelectric segments. These insulating layers allow electrical connection through connection wires while preventing direct current propagation that would cause short circuits. The insulating layers act as barriers that isolate segments electrically while permitting controlled power distribution through designated wire paths.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration effectively limits the propagation of breakdowns to individual electrode segments, minimizing functional loss and ensuring continued operation by preventing short circuits and maintaining power supply to unaffected segments.
Implementation Method 1
a piezoelectric layer (38), which expands and contracts in response to an applied voltage
Data Source
AI summary
A piezoelectric actuator is formed like a rectangular flat plate, and includes a substrate layer, a lower electrode layer, a piezoelectric layer, and an upper electrode layer formed in this order from bottom to top in a thickness direction. The upper electrode layer is constituted of a plurality of electrode segments separated in a surface direction, and connection wires connecting the electrode segments which are adjoining in the surface direction.


