Segmented Pipe Mechanism for High-Pressure Fluid Drying
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Solution Overview
Problem
In semiconductor manufacturing, the use of high-pressure fluids for drying substrates can lead to equipment damage due to rapid pressure and temperature changes when the fluid flows through pipes, and existing technologies do not effectively prevent the high-pressure fluid from flowing into other apparatuses during processing.
Innovation Solution
A substrate processing apparatus with a pipe system divided into first and second pipe members, equipped with a connecting/disconnecting mechanism and valves, which allows for controlled flow and separation of high-pressure fluids, preventing them from flowing into other apparatuses and maintaining the high-pressure state for efficient drying without equipment damage.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Productivity
If high-pressure fluid is supplied to the processing chamber, then drying efficiency is improved, but equipment damage occurs due to rapid pressure and temperature changes
Solution Approach 1:
The pipe is divided into a first pipe member and a second pipe member that can be separated from each other. This segmentation allows the system to isolate the high-pressure fluid supply path, preventing uncontrolled pressure changes that could damage equipment while maintaining efficient drying when the pipe members are connected
Solution Approach 2:
The pipe members are connected in advance before supplying the high-pressure fluid to the processing chamber. This preliminary connection ensures the system is properly configured to handle high-pressure fluid flow, preventing equipment damage from rapid pressure changes while enabling efficient drying operation
2Reliability
If the pipe is divided into separable pipe members, then equipment protection is improved, but device complexity increases
Solution Approach 1:
The pipe is segmented into a first pipe member and a second pipe member that can be separated. This segmentation protects equipment by allowing isolation of the high-pressure fluid path while adding only minimal complexity through the separation mechanism
Solution Approach 2:
The pipe members are designed to be dynamically connectable and separable rather than fixed. This dynamic configuration allows the system to adapt between connected state for equipment protection and separated state for maintenance or emergency situations, with the complexity managed through standardized connection interfaces
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution effectively prevents high-pressure fluid leakage into other apparatuses, ensuring safe and efficient processing by maintaining the high-pressure state within the processing vessel, thereby protecting equipment and maintaining processing integrity.
Implementation Method 1
when the high-pressure fluid is changed to a gaseous state, the liquid can be dried without being influenced by the surface tension
Implementation Method 2
a connecting/disconnecting mechanism configured to move at least one of the first pipe member and the second pipe member between a connection position at which the first pipe member and the second pipe member are connected and a separation position at which the first pipe member and the second pipe member are separated
Implementation Method 3
opening/closing valves installed in the first pipe member and the second pipe member, respectively and configured to be closed at the time of separating the pipe members
Data Source
AI summary
Disclosed is a substrate processing apparatus including a processing vessel in which a target substrate W is processed by using a high-pressure fluid in a supercritical state or a subcritical state, and pipes that are divided into a first pipe member and a second pipe member in a flowing direction of the fluid and circulate the fluid are connected to processing vessel. A connecting/disconnecting mechanism moves at least one of first and second pipe members between a connection position and a separation position of first pipe member and the second pipe member, and opening/closing valves are installed in each of first and second pipe members and are closed at the time of separating pipe members.