Segmented Polysilicon Resistor Layout for Improved Linearity
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Solution Overview
Problem
Achieving highly linear resistors in integrated circuits is challenging due to the non-linear resistance variation with applied voltage in polycrystalline silicon resistive elements.
Innovation Solution
The semiconductor device incorporates multiple resistive segments with floating plates disposed proximate to each segment, allowing for refined coupling effects that enhance the linearity of resistance by offsetting non-linearity between adjacent segments.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of manufacture
If polycrystalline silicon resistive elements are used in integrated circuits, then the device complexity is reduced and manufacturing is simplified, but the resistance varies non-linearly with applied voltage due to carrier accumulation or depletion in the presence of electric fields
Solution Approach 1:
The resistive element is divided into multiple resistive segments (first resistive segment, second resistive segment, etc.) arranged in series between the terminals. Each segment is associated with its own floating plate, allowing independent control of the electric field in each segment. This segmentation enables the non-linear resistance characteristics of individual segments to be managed and compensated, improving overall linearity while maintaining manufacturing simplicity.
Solution Approach 2:
Floating plates are introduced as intermediary elements disposed physically proximate to each resistive segment. These floating plates are electrically isolated (floating) and can be coupled to terminals through resistive elements, creating controlled electric fields that modulate carrier distribution in the adjacent resistive segments. This intermediary structure allows precise control of the electric field environment without directly connecting to the signal path, thereby improving resistance linearity.
2Measurement precision
If floating plates are added to each resistive segment to improve resistance linearity, then the measurement precision of resistance is improved, but the device complexity increases due to additional structures
Solution Approach 1:
Multiple resistive segments and their associated floating plates are merged into a single integrated resistor structure. The floating plates are strategically positioned and electrically connected in a manner that combines their individual effects to achieve overall linearity improvement. For example, floating plates may be coupled to different terminals in a pattern that creates complementary electric field effects, merging the functionality of multiple components into a unified linear resistor.
Solution Approach 2:
The invention changes the electrical parameters (voltage, carrier concentration) in the vicinity of each resistive segment by introducing floating plates that can be biased at different potentials. By adjusting the voltage on floating plates relative to adjacent terminals, the electric field distribution is modified to compensate for non-linear effects. This parameter control approach improves linearity without requiring fundamental changes to the resistive material or structure.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration significantly improves the linearity of resistance in the semiconductor device, effectively addressing the non-linear resistance issues in polycrystalline silicon resistive elements.
Implementation Method 1
the resistance of polycrystalline silicon (also referred to as polysilicon, poly-Si or simply poly) varies with the applied voltage in a non-linear fashion in the presence of an electric field
Implementation Method 2
a first floating plate disposed physically proximate the first resistive segment and comprising a first end coupled to one of the first terminal and the second terminal
Data Source
AI summary
A semiconductor device includes a first terminal, a second terminal positioned away from the first terminal, a first resistive segment coupled between the first terminal and the second terminal, a third terminal positioned away from the first terminal and the second terminal, a second resistive segment coupled between the second terminal and third terminal, a first floating plate disposed physically proximate the first resistive segment and including a first end coupled to one of the first terminal and the second terminal, and a second floating plate disposed physically proximate the second resistive segment and including a first end coupled to one of the second terminal and the third terminal.