Segmented Pulse Generator for High-Voltage Capacitive Loads
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Existing high-power generators struggle to deliver high voltage and high current pulses efficiently to capacitive loads in plasma processes, particularly in applications like etching and layer deposition, due to voltage handling limitations of semiconductor switches and the need for high-frequency operation.
Innovation Solution
A high-power generator system comprising multiple low-power generators with energy storage components, connected in a coupling configuration, where the output is achieved through sequential activation of LP-generators to form a step-function pulse without continuous slope, utilizing a control unit to select contributions and manage energy distribution efficiently, with transformers and balancing windings for AC supply and charge balancing.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Power
If a single high-power generator is used to deliver high voltage and high current pulses, then the power delivery capability is improved, but the voltage handling capability of semiconductor switches deteriorates
Solution Approach 1:
The patent divides a single high-power generator into multiple low-power generators, each operating within its safe voltage handling capability. These segmented generators are coupled together through a coupling circuit to deliver the required high power to the plasma process, thereby resolving the contradiction between power delivery capability and voltage handling reliability
2Reliability
If multiple low-power generators are coupled to achieve high power output, then the voltage handling capability is improved, but the device complexity increases
Solution Approach 1:
The patent merges multiple low-power generators into a unified high-power system through a coupling circuit. The control unit coordinates the operation of individual generators, merging their outputs to achieve the desired high power delivery while maintaining manageable complexity through systematic control
3Speed
If LP-generators are activated sequentially to form step-function pulses, then the pulse rise time is improved, but the activation control complexity increases
Solution Approach 1:
The patent implements dynamic activation of low-power generators based on real-time plasma process requirements. The control unit dynamically selects and activates individual LP-generators in sequence to create step-function voltage pulses with controlled rise times, adapting the activation pattern to optimize both speed and control complexity
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration allows for efficient delivery of high power pulses with sharp voltage transitions and reduced power losses, enabling effective plasma processing by overcoming voltage handling limitations and achieving stable, high-frequency operation.
Implementation Method 1
each LP-generator comprising an energy storage component, wherein in use the energy storage component is charged to a predefined value related to the energy storage component
Implementation Method 2
The charging energy of the LP-generators is supplied over a transformer, with a primary winding, and a secondary winding for each LP-generator
Implementation Method 3
The rectifier may comprise at least one semiconductor element such as a diode. The rectifier may comprise four diodes connected in a bridge rectifier way
Data Source
Figure 1
Figure 2a~2b
Figure 3
AI summary
High-power- (HP-) generator (10) and a method to deliver pulsed high power with a high value of voltage and/or high current value to a capacitive load, in particular to a plasma process, comprising: - several low-power- (LP-) generators (14, 16 ,18), ∘ each LP-generator (14, 16, 18) comprising an energy storage component (C1, L1), wherein in use the energy storage component (C1, L1) is charged to a predefined value related to the energy storage component, ∘ each LP-generator (14, 16, 18) supplying, in use, at its output an LP-generator-value which corresponds to the value of the energy storage component (C1, C2, Cn L1, L2, Ln) incorporated in the respective LP-generator (14, 16, 18), - a coupling (20) in which the LP-generators (14, 16, 18) are electrically connected such that a coupling-value at the output of the coupling (20), which corresponds to the output value of the HP-generator (10), may be obtained, and which is, in use, at least in some states of the HP-generator (10) higher than the LP-generator-value at the output of one of the LP-generators (14, 16, 18), - a control unit (22) configured to select the contribution of LP-generators (14, 16, 18) to the output value of the HP-generator (10) during power delivery of the HP-generator (10), in order to generate a rise and/or decay of a pulse at the output of the coupling (20), - wherein a control unit (22) is further configured to select the contribution of LP-generators (14, 16, 18) in a way that one or a combination of the following features are accomplished: the output of the coupling (20) and/or the output of the HP-generator (10) is a step-function, in particular at the rising and/or falling edge of a pulse and/or during the pulse.