Segmented Pulse Generator for High-Voltage Plasma Power
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Solution Overview
Problem
Plasma treatment applications, such as etching or layer deposition, require high voltage and high frequency rectangular, asymmetrical, pulsed voltage supplies, which exceed the voltage handling capabilities of individual semiconductor switches, especially during high frequency operation.
Innovation Solution
A high power generator configured with multiple low power generators, each with an energy storage component, electrically connected through a coupling to achieve higher output values, and a control unit that selectively activates the generators to produce step-function pulses with sharp edges and varying amplitudes, eliminating the need for continuous slope generators and reducing power losses.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Power
If individual semiconductor switches are used to generate high voltage pulses, then the device complexity is reduced, but the voltage handling capability is insufficient for high frequency operation
Solution Approach 1:
The high power generator is segmented into multiple low power generators, each with its own energy storage component. This segmentation allows each unit to operate within its voltage handling capabilities while collectively achieving the required high voltage output through electrical connection and controlled activation.
Solution Approach 2:
Multiple low power generators are electrically connected through a coupling mechanism to merge their individual outputs. The control unit coordinates the activation of these generators to produce a combined high voltage pulse that exceeds the capability of any single generator, effectively merging their capabilities to overcome the voltage handling limitation.
2Power
If multiple low power generators are electrically connected to achieve high power output, then the voltage handling capability is improved, but the device complexity increases
Solution Approach 1:
The coupling mechanism serves multiple functions: it electrically connects the low power generators, enables selective activation, and facilitates the combination of their outputs. This multi-functionality reduces the need for additional specialized components, managing the complexity introduced by the multi-generator architecture.
Solution Approach 2:
The system employs dynamic control through the control unit, which selectively activates specific low power generators based on the required output characteristics. This dynamic activation strategy allows the system to adapt its configuration to match the demand, optimizing performance while managing complexity through intelligent control rather than fixed hardware configurations.
3Loss of energy
If continuous slope generators are used to produce smooth voltage transitions, then the voltage transitions are smooth, but the power losses increase
Solution Approach 1:
The system uses periodic switching action to generate voltage transitions instead of continuous slope generation. By rapidly switching between discrete voltage levels from different low power generators, the system achieves the required transitions with reduced dwell time in intermediate states, thereby minimizing power losses associated with continuous analog adjustments.
Solution Approach 2:
Energy storage components in each low power generator are pre-charged to specific voltage levels before activation. This preliminary charging allows the generators to deliver predetermined voltage steps without requiring continuous adjustment during the pulse formation, reducing power losses that would occur during real-time voltage modulation.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution enables efficient delivery of high power pulses with sharp voltage transitions and reduced power losses, effectively addressing the limitations of existing technologies in handling high voltage and frequency requirements in plasma processes.
Implementation Method 1
Each respective LP generator (14, 16, 18) comprises an energy storage component (C1, C2, Cn), wherein in use the energy storage component is charged to a respective predefined value related to the energy storage component
Data Source
AI summary
A high power (HP) generator includes a plurality of low power (LP) generators, a coupling in which the plurality of LP generators is electrically connected, and a control unit. During operation, a coupling-value at an output of the coupling is higher than an LP-generator-value at an output of one of the plurality of LP generators. The control unit is configured to select a contribution of each LP generator to an output value of the HP generator, in a way that one or a combination of following is accomplished: (i) the output of the coupling and/or the output of the HP generator is a step function, (ii) the plurality of LP generators is activated sequentially during a pulse, (iii) at least one amplitude step is lower than 1 kV, and (iv) the plurality of LP generators is connected by switching only.