Segmented Pulse Generator Topology for High-Voltage Capacitive Loads
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Solution Overview
Problem
Existing high-power generators struggle to deliver high voltage and high current pulses efficiently to capacitive loads in plasma processes, particularly in applications like etching and layer deposition, due to voltage handling limitations of semiconductor switches and high frequency requirements.
Innovation Solution
A high-power generator system comprising multiple low-power generators with energy storage components, connected in a coupling configuration and controlled by a unit to produce a step-function output, with damping circuits and sequential activation of generators to manage oscillations and achieve sharp voltage transitions.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Power
If a single high-power generator is used to deliver high voltage and high current pulses, then the power delivery capability is improved, but the voltage handling capability of semiconductor switches deteriorates
Solution Approach 1:
The high-power generator is divided into multiple low-power generator modules (first LP-generator, second LP-generator, etc.), each capable of operating within safe voltage limits. These modules are connected in series through a coupling circuit, allowing their voltages to add up to achieve the required high output voltage while each individual module remains within reliable operating parameters
2Reliability
If multiple low-power generators are connected in series to achieve high voltage, then the voltage handling capability is improved, but the device complexity increases
Solution Approach 1:
Multiple low-power generator modules are merged through a coupling circuit that combines their outputs in series. The control unit coordinates the switching and synchronization of these modules, managing the complexity through integrated control rather than separate independent systems
Solution Approach 2:
Each low-power generator module is designed as a universal building block that can be replicated and combined in different configurations. The same basic module design serves multiple purposes depending on how many are connected and how they are controlled, reducing overall system complexity through standardization
3Speed
If semiconductor switches are used for high frequency operation, then the operating frequency is improved, but the voltage handling possibilities deteriorate
Solution Approach 1:
The high voltage requirement is segmented across multiple low-voltage generator modules, allowing semiconductor switches to operate at high frequencies within their safe voltage ratings while the cumulative output achieves the required high voltage level
Solution Approach 2:
The system dynamically controls the activation and switching of individual generator modules based on the required output characteristics. The control unit adjusts which modules are active and their switching timing to optimize both frequency response and voltage output for different operating conditions
Data Source
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AI summary
High-power- (HP-) generator (10) and method to deliver pulsed high power with a high value of voltage and/or high current value to a capacitive load, in particular to a plasma process, comprising: - several low-power- (LP-) generators (14, 16 ,18), o each LP-generator (14, 16, 18) comprising an energy storage component (C1, L1), wherein in use the energy storage component (C1, L1) is charged to a predefined value related to the energy storage component, o each LP-generator (14, 16, 18) supplying, in use, at its output an LP-generator-value which corresponds to the value of the energy storage component (C1, C2, Cn L1, L2, Ln) incorporated in the respective LP-generator (14, 16, 18), - a coupling (20) in which the LP-generators (14, 16, 18) are electrically connected such that a coupling-value at the output of the coupling (20), which corresponds to the output value of the HP-generator (10), may be obtained, and which is, in use, at least in some states of the HP-generator (10) higher than the LP-generator-value at the output of one of the LP-generators (14, 16, 18), - a control unit (22) configured to select the contribution of LP-generators (14, 16, 18) to the output value of the HP-generator (10) during power delivery of the HP-generator (10), in order to generate a rise and/or decay of a pulse at the output of the coupling (20), - wherein a damping circuit (50) is positioned between several, in particular all of the LP-generators (14, 16, 18) in an open chain configuration, where in particular the damping circuit (50) comprises a resistor (R) and/or an inductivity (L).