Segmented Pumping Capacitor Layout for Precise Charge Pump Capacitance
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Solution Overview
Problem
Existing semiconductor memory devices face challenges in achieving desired pumping capacitance using conventional pumping capacitors, which affects the generation of high and low voltages required for memory cell operations.
Innovation Solution
The design incorporates a pumping capacitor with multiple cell capacitors connected in series and parallel configurations, allowing for adjustable capacitance by varying the number of connected cell capacitors, enabling the generation of specific pumping capacitance values.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If conventional pumping capacitors are used, then the structure is simple, but the desired pumping capacitance cannot be achieved
Solution Approach 1:
The pumping capacitor is divided into multiple cell capacitors (first cell capacitors and second cell capacitors) that can be independently connected in series or parallel configurations. This segmentation allows precise control of the total pumping capacitance by selecting different connection patterns, resolving the contradiction between achieving desired capacitance values and maintaining structural simplicity.
2Manufacturing precision
If multiple cell capacitors are connected in series and parallel, then precise capacitance control is achieved, but the device size increases
Solution Approach 1:
Multiple cell capacitors are merged into a single pumping capacitor structure by connecting them in series and parallel combinations. This merging approach achieves precise capacitance control while sharing common electrodes (first pad electrode, second pad electrode, third pad electrode, fourth pad electrode) among the cell capacitors, thereby reducing the overall area compared to using completely separate capacitor structures.
3Manufacturing precision
If multiple cell capacitors are used, then pumping capacitance is optimized, but current consumption increases
Solution Approach 1:
The pumping capacitor employs dynamic switching of cell capacitor connections between series and parallel configurations based on operational requirements. This dynamic reconfiguration allows the system to optimize capacitance values for different pumping phases while minimizing current consumption by activating only the necessary number of cell capacitors during each operation cycle.
Data Source
AI summary
A pumping capacitor is provided. The pumping capacitor includes: first, second, third and fourth electrodes that are separately formed on a substrate; a first pumping capacitor group, wherein i first cell capacitors have lower electrodes formed on the first pad electrode and upper electrodes connected to a plate electrode, and (n−i) first cell capacitors have lower electrodes formed on the second pad electrode and upper electrodes connected to the plate electrode; and a second pumping capacitor group, wherein i second cell capacitors have lower electrodes formed on the fourth pad electrode and upper electrodes connected to the plate electrode, and (n−i) second cell capacitors have lower electrodes formed on the third pad electrode and upper electrodes connected to the plate electrode. The first pumping capacitor group and the second pumping capacitor group are connected in series, and the second pad electrode and the third pad electrode are floated.