Segmented Rod Lens for Semiconductor Defect Detection

Solution Overview

Problem

In examination processes for detecting small defects in products like semiconductors and LCDs, the use of multiple light receiving units can lead to unnecessary light irradiation onto shadow regions due to structural issues, causing loss of light efficiency and reflection noise.

Innovation Solution

A rod lens with a continuous incident surface and a separated exit surface is used in a lighting apparatus, ensuring that light is directed only to the recording regions of the light receiving units, preventing irradiation onto shadow areas and enhancing detectability.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If multiple light receiving units are mounted on the examination apparatus to detect smaller defects at higher speeds, then examination coverage and detection speed are improved, but unnecessary light irradiation onto shadow regions occurs causing light efficiency loss and reflection noise

Engineering Contradiction:

Improveexamination speed and coverageVSAvoidlight efficiency

Core Design Contradiction:

ProductivityVSLoss of energy

Solution Approach 1:

The rod lens is divided into multiple independent light transmitting regions corresponding to each light receiving unit, with light blocking regions between them. This segmentation ensures that each light receiving unit receives light only from its corresponding examination region without interference from adjacent regions, eliminating unnecessary light irradiation and reflection noise while maintaining high examination speed and coverage.

Inventive Principle:

Principle #1Segmentation

2Productivity

If multiple light receiving units are mounted on the examination apparatus to detect smaller defects at higher speeds, then examination coverage and detection speed are improved, but reflection noise increases due to light irradiation onto shadow regions

Engineering Contradiction:

Improveexamination speed and coverageVSAvoidreflection noise

Core Design Contradiction:

ProductivityVSObject-generated harmful factors

Solution Approach 1:

The rod lens is divided into multiple independent light transmitting regions corresponding to each light receiving unit, with light blocking regions between them. This segmentation ensures that each light receiving unit receives light only from its corresponding examination region without interference from adjacent regions, eliminating unnecessary light irradiation and reflection noise while maintaining high examination speed and coverage.

Inventive Principle:

Principle #1Segmentation

3Ease of manufacture

If a conventional rod lens with continuous surfaces is used, then the structure is simple and easy to manufacture, but light is irradiated onto shadow regions causing loss of light efficiency

Engineering Contradiction:

Improvelens structure simplicityVSAvoidlight efficiency

Core Design Contradiction:

Ease of manufactureVSLoss of energy

Solution Approach 1:

The rod lens is divided into multiple independent light transmitting regions corresponding to each light receiving unit, with light blocking regions between them. This segmentation ensures that each light receiving unit receives light only from its corresponding examination region without interference from adjacent regions, eliminating unnecessary light irradiation and reflection noise while maintaining high examination speed and coverage.

Inventive Principle:

Principle #1Segmentation

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration minimizes light loss and reflection noise by precisely controlling light irradiation, improving the efficiency and accuracy of defect detection in examination processes.

Implementation Method 1

a rod lens having a rectangular rod structure, including a first end and a second end opposing each other, in which the first end is formed of one continuous surface, and the second end is formed of a plurality of separated surfaces. The first end is a light incident surface of the lens, and the second end is a light exit surface of the lens.

Methodology Applied

Scientific EffectLight transmission and refraction: Refraction

Data Source

PatentUS9546772B2Rod lens for lighting apparatus, lighting apparatus including the same and semiconductor manufacturing method using the apparatus

Publication Date: 2017.01.17 SAMSUNG ELECTRONICS CO LTD

AI summary

A rod lens for a lighting apparatus and a lighting apparatus including the rod lens are disclosed. The rod lens having a rectangular rod structure extends lengthwise and includes a first end and a second end opposing each other. The first end is a light incident surface and formed of one continuous surface. The second end is a light exit surface and formed of a plurality of separated surfaces.