Segmented Seal Ring Structure for IC Moisture Protection

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Solution Overview

Problem

Conventional seal rings in integrated circuits cause signal interference and block signal transmission due to their closed structure, and they fail to effectively prevent moisture from entering the circuit, which can lead to corrosion and damage.

Innovation Solution

A seal ring structure comprising an inner and outer seal ring with gaps and fence-shaped seal units between them, allowing for reduced moisture entry while maintaining signal transmission by creating a non-closed, snake path and bevel edge design.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If a conventional closed seal ring structure is used, then moisture prevention is improved, but signal transmission is blocked and signal interference occurs

Engineering Contradiction:

Improvemoisture preventionVSAvoidsignal interference

Core Design Contradiction:

ReliabilityVSObject-generated harmful factors

Solution Approach 1:

The seal ring is divided into multiple segments (first seal ring, second seal ring, and fence-shaped seal units) arranged at intervals, creating a non-closed structure with gaps. This segmentation allows RF signals to pass through while still providing moisture prevention, resolving the contradiction between moisture prevention and signal transmission.

Inventive Principle:

Principle #1Segmentation

2Reliability

If a conventional closed seal ring structure is used, then moisture prevention is improved, but signal transmission is blocked

Engineering Contradiction:

Improvemoisture preventionVSAvoidsignal transmission

Core Design Contradiction:

ReliabilityVSProductivity

Solution Approach 1:

Inventive Principle:

Principle #1Segmentation

3Reliability

If the seal ring is positioned close to dicing paths for better protection, then moisture prevention is improved, but the seal ring becomes vulnerable to damage during dicing

Engineering Contradiction:

Improvemoisture preventionVSAvoidseal ring durability

Core Design Contradiction:

ReliabilityVSStrength

Solution Approach 1:

The seal ring is divided into multiple segments (first seal ring, second seal ring, and fence-shaped seal units) arranged at intervals. This segmentation allows the seal ring to be positioned closer to the dicing path for better protection while the gaps reduce vulnerability to damage during the dicing process.

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

The seal ring structure combines multiple conductive layers (first conductive layer, second conductive layer, third conductive layer) with different configurations to create a composite structure that is both protective and durable during the dicing process.

Inventive Principle:

Principle #40Composite materials

Data Source

PatentUS11448318B2Seal ring structure

Publication Date: 2022.09.20 UNITED MICROELECTRONICS CORP

AI summary

The invention provides a seal ring structure, which comprises a substrate, and a seal ring positioned on the substrate, wherein the seal ring comprises an inner seal ring comprising a plurality of inner seal units, wherein each of the inner seal units is arranged at intervals with each other, an outer seal ring comprising a plurality of outer seal units arranged at the periphery of the inner seal ring, wherein each of the outer seal units is arranged at intervals with each other, and a plurality of groups of fence-shaped seal units, wherein at least one group of fence-shaped seal units is positioned between one of the inner seal units and the other adjacent outer seal unit.