Segmented Sensor Membrane for Multi-Range Force Detection
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Solution Overview
Problem
Existing sensors that measure multiple ranges of force or pressure require multiple membranes, leading to high production time and cost due to the need for numerous production steps, such as etching separate recesses.
Innovation Solution
A sensor design with a single membrane having sections that are more deflectable in different force ranges, allowing for multiple force detection without the need for multiple membranes, achieved by etching a single cavity in the wafer to create distinct portions with varying depths and recesses.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If multiple membranes are used to sense multiple ranges of force or pressure, then measurement precision is improved, but device complexity and manufacturing cost increase
Solution Approach 1:
The single membrane is divided into multiple sections with different thicknesses, where each section has different deflectability for sensing different force ranges. This segmentation allows one membrane to perform the function of multiple membranes while reducing device complexity
Solution Approach 2:
Different sections of the membrane have different local properties (thickness variations) to optimize performance for specific force ranges. The first section has different thickness characteristics than the second section, allowing each to be optimized for its designated sensing range
2Measurement precision
If multiple membranes are used to sense multiple ranges of force or pressure, then measurement precision is improved, but manufacturing time and cost increase
Solution Approach 1:
Multiple membrane functions are merged into a single membrane structure. Instead of producing separate membranes for different force ranges, one membrane integrates all sensing capabilities through its segmented design with varying thickness sections
Solution Approach 2:
The single membrane is designed to perform multiple functions by having different sections that respond to different force ranges. This multi-functional design eliminates the need for multiple specialized membranes, reducing manufacturing steps and cost
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Reduces production steps and costs while maintaining sensitivity across multiple force or pressure ranges by using a single membrane with different deflectable sections, each sensitive to specific ranges of applied force.
Implementation Method 1
a membrane deflectable into the cavity under an applied force. The membrane has a first section and a second section. The first section of the membrane is more deflectable than the second section in a first range of the applied force and the second section is more deflectable than the first section in a second range of the applied force
Data Source
AI summary
A body of a sensor includes a wafer having a cavity and a membrane deflectable into the cavity under an applied force. The membrane has a first section and a second section. The first section of the membrane is more deflectable than the second section in a first range of the applied force and the second section is more deflectable than the first section in a second range of the applied force that is different than the first range.