Segmented Shield Inductor for Power Metering Noise Suppression
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Solution Overview
Problem
In semiconductor devices used for power metering, the noise generated by inductors due to magnetic field fluctuations affects detection accuracy, and existing shielding methods either fail to suppress noise leakage or degrade magnetic field detection sensitivity.
Innovation Solution
A multilayered wiring structure is employed to form an inductor surrounded by an upper and lower shield, with specific openings in the upper shield to allow magnetic field intensity changes to reach the inductor while minimizing noise leakage, using a configuration that includes multiple turns and ring-like members to enhance detection sensitivity.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Object-affected harmful factors
If the upper side and lower side of the inductor are covered by conductor patterns to suppress noise leakage, then noise suppression is improved, but magnetic field detection accuracy is degraded
Solution Approach 1:
The upper shield pattern is divided into multiple segments with openings between them, allowing magnetic field intensity changes to reach the inductor while still providing noise suppression. The shield is segmented rather than continuous, resolving the contradiction between noise blocking and magnetic field penetration.
Solution Approach 2:
The shield pattern has different properties in different regions: areas with openings allow magnetic field penetration for detection accuracy, while areas with conductor patterns provide noise suppression. This local differentiation of shield properties resolves the contradiction between noise suppression and magnetic field detection.
2Object-affected harmful factors
If the inductor is surrounded by complete shields on upper and lower sides, then noise leakage is suppressed, but magnetic field intensity change cannot reach the inductor
Solution Approach 1:
The shield patterns are segmented with openings that allow magnetic field intensity changes to reach the inductor while maintaining noise suppression functionality. The segmentation enables both shield protection and magnetic field penetration simultaneously.
Solution Approach 2:
The openings in the shield patterns act as intermediaries that allow magnetic field intensity changes to pass through to the inductor while the conductor patterns provide noise suppression. This intermediary structure resolves the contradiction between shielding and magnetic field access.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration effectively suppresses noise leakage and maintains or improves magnetic field detection sensitivity, allowing for accurate power measurement while reducing external noise interference.
Implementation Method 1
When current amount flowing in the power line is changed, magnetic field intensity generated from the power line changes. Voltage is generated across the inductor according to this change of the magnetic field intensity.
Implementation Method 2
An upper shield part is provided in a layer higher than the inductor and a lower shield part is provided in a layer lower than the inductor... it is possible to suppress leakage of noise caused by the inductor to the outside
Data Source
AI summary
To suppress the noise caused by an inductor leaks to the outside, and also to be configured such that magnetic field intensity change reaches the inductor. An inductor surrounds an internal circuit in a planar view and also is coupled electrically to the internal circuit. The upper side of the inductor is covered by an upper shield part and the lower side of the inductor is covered by a lower shield part. The upper shield part is formed by the use of a multilayered wiring layer. The upper shield part has plural first openings. The first opening overlaps the inductor in the planar view.