Segmented Silicon Carbide Liner for Polysilicon Reactors

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Solution Overview

Problem

Fluidized bed reactors face contamination issues due to materials used in constructing reactor components, leading to impurities in polysilicon-coated particles, and manufacturing limitations prevent the use of single-piece silicon carbide liners in commercial-scale reactors, necessitating segmented liners with low contamination levels and suitable bonding materials.

Innovation Solution

The use of reaction-bonded silicon carbide (SiC) liners with low surface contamination levels and a bonding material comprising lithium silicate and silicon carbide particles, applied to segmented SiC segments, which are heat-cured in a hydrocarbon-free atmosphere to form a strong and leak-tight bond, reducing mobile metal contamination and maintaining mechanical integrity.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Object-affected harmful factors

If a single-piece silicon carbide liner is used, then contamination levels are reduced, but manufacturing limitations prevent its use in commercial-scale reactors

Engineering Contradiction:
Improvecontamination levelsVSAvoidmanufacturing feasibility
Core Design Contradiction:
Object-affected harmful factorsVSEase of manufacture

Solution Approach 1:

The liner is divided into multiple silicon carbide segments that can be manufactured separately and then assembled together using bonding material. This segmentation allows each segment to be produced within existing manufacturing capabilities while the assembled liner provides the low contamination performance of a monolithic structure.

Inventive Principle:
Principle #1Segmentation

2Ease of manufacture

If segmented liners are used to overcome manufacturing limitations, then manufacturing feasibility is improved, but contamination risks increase due to bonding materials

Engineering Contradiction:
Improvemanufacturing feasibilityVSAvoidcontamination risks
Core Design Contradiction:
Ease of manufactureVSObject-affected harmful factors

Solution Approach 1:

The bonding material composition is optimized with specific ratios of lithium silicate (5-20 wt%), silicon carbide particles (70-90 wt%), and aluminum silicate (5-20 wt%). This parameter optimization ensures the bonding material provides sufficient mechanical strength while maintaining low contamination levels compatible with polysilicon production requirements.

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The bonding material is heat-cured in a hydrocarbon-free atmosphere to prevent contamination during the curing process. This creates a controlled environment that prevents introduction of harmful contaminants to the liner segments and bonding material interface.

Inventive Principle:
Principle #39Inert atmosphere (Inert environment)

3Strength

If bonding material is applied to join segments, then mechanical integrity is achieved, but mobile metal contamination may be introduced

Engineering Contradiction:
Improvemechanical integrityVSAvoidmobile metal contamination
Core Design Contradiction:
StrengthVSObject-affected harmful factors

Solution Approach 1:

The bonding material formulation uses controlled amounts of lithium silicate (5-20 wt%) and aluminum silicate (5-20 wt%) within specified particle size ranges. These parameter controls ensure adequate bond strength while limiting mobile metal content to levels that do not compromise polysilicon product quality.

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

Heat curing is performed in a hydrocarbon-free atmosphere to prevent contamination and ensure the bonding material sets without introducing mobile metal impurities. This controlled atmosphere prevents unwanted chemical reactions and contamination during the curing process.

Inventive Principle:
Principle #39Inert atmosphere (Inert environment)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution effectively minimizes polysilicon granule contamination and ensures the mechanical strength and integrity of segmented SiC liners, allowing for efficient polysilicon production with reduced operational downtime and contamination risks.

Implementation Method 1

heat-cured in a hydrocarbon-free atmosphere to form a strong and leak-tight bond

Methodology Applied
Scientific EffectHeat curing: Heating

Implementation Method 2

bonding material comprising lithium silicate and silicon carbide particles, applied to segmented SiC segments, which are heat-cured

Methodology Applied
Scientific EffectSintering: Sintering

Implementation Method 3

reaction-bonded silicon carbide (SiC) liners with low surface contamination levels

Methodology Applied
Scientific EffectReaction bonding: Chemical Bonding

Data Source

PatentUS9238211B1Segmented silicon carbide liner
Publication Date: 2016.01.19 REC SILICON INC
  • US9238211B1 patent drawing
  • US9238211B1 patent drawing
  • US9238211B1 patent drawing

AI summary

Segmented silicon carbide liners for use in a fluidized bed reactor for production of polysilicon-coated granulate material are disclosed, as well as methods of making and using the segmented silicon carbide liners. Non-contaminating bonding materials for joining silicon carbide segments also are disclosed. One or more of the silicon carbide segments may be constructed of reaction-bonded silicon carbide.