Multi-die IC Assembly Using Segmented Silicon Interposer

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Solution Overview

Problem

Current 2.5D IC packaging is limited by the size of silicon interposers, which restricts the combination of large dies due to manufacturing constraints and increased costs associated with larger substrates, necessitating a method to accommodate larger package sizes using conventional photolithography technology.

Innovation Solution

The design involves a silicon interposer with an active area for TSVs and interconnects, allowing larger dies to be combined by aligning only portions of the dies over the active area, and using support structures to extend beyond the interposer periphery, enabling a larger package size while maintaining manufacturability with conventional technology.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Area of stationary object

If the interposer substrate size is increased to accommodate larger dies or more dies, then the packaging capacity and functionality are improved, but the manufacturing cost increases and yield decreases due to specialized photolithography requirements

Engineering Contradiction:
Improveinterposer substrate areaVSAvoidmanufacturability
Core Design Contradiction:
Area of stationary objectVSEase of manufacture

Solution Approach 1:

The patent divides the large interposer substrate into multiple smaller interposer substrates, each within the manufacturable size range. These segmented substrates are then assembled together to form the complete large-scale package, enabling both large area and conventional manufacturing processes to be utilized.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent transitions from a single-plane 2D arrangement to a multi-layer 3D configuration by stacking multiple interposer substrates vertically. This dimensional change allows the system to achieve large effective area through vertical integration rather than horizontal expansion, bypassing photolithography size limits.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Adaptability or versatility

If the interposer substrate size is increased to accommodate larger dies, then the package size and die combination capability are improved, but the photolithography process becomes specialized and costly

Engineering Contradiction:
Improvedie combination capabilityVSAvoidphotolithography process complexity
Core Design Contradiction:
Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The patent segments the interposer substrate into multiple smaller units that can each be manufactured using standard photolithography processes. This segmentation maintains adaptability for various die combinations while avoiding the need for complex specialized lithography equipment.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent performs preliminary assembly of multiple small interposer substrates before final die mounting. This preliminary structuring allows standard photolithography to be used for each small substrate while the overall system achieves the required versatility through pre-configured modular architecture.

Inventive Principle:
Principle #10Preliminary action

3Quantity of substance

If multiple large flip-chip mounted dies are placed side by side on a single interposer substrate, then the functionality is improved, but the required interposer substrate size exceeds conventional manufacturing capabilities

Engineering Contradiction:
Improvenumber of dies per packageVSAvoidinterposer substrate area
Core Design Contradiction:
Quantity of substanceVSArea of stationary object

Solution Approach 1:

The patent divides the package into multiple smaller interposer substrates, each capable of accommodating a manageable number of dies. This segmentation enables conventional manufacturing while achieving high die quantity through the assembly of multiple substrates.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The patent utilizes vertical stacking to arrange multiple interposer substrates in the third dimension, allowing a large number of dies to be packaged without requiring a single large horizontal substrate area. This 3D arrangement achieves high die density while maintaining manufacturable substrate sizes.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Data Source

PatentEP2873096B1Multi-die integrated circuit assembly with large sized silicon interposer overcoming the reticle area limitations
Publication Date: 2018.05.09 HUAWEI TECH CO LTD
  • EP2873096B1 patent drawingFigure 1~3
  • EP2873096B1 patent drawingFigure 2A~2B

AI summary

A multi-die integrated circuit assembly includes an interposer substrate larger than the typical reticle size used in fabricating the "active area" in which the through-silicon vias (TSVs) and interconnect conductors are formed in the interposer. At the same time, each of the dies has its external power/ground and I/O signal line connections concentrated into a smaller area of the die. The dies are disposed or mounted on the interposer such that these smaller areas (with the power/ground/IO connections) overlap with the active area of the interposer. In this configuration, a plurality of dies having a combined area substantially greater than the active area of the interposer can be mounted on the interposer (and take advantage of the active area for interconnections).