Segmented Stage Plate with Interstitial Channels for Stiffness and Weight
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Solution Overview
Problem
Existing stage apparatuses face challenges in achieving high stiffness and light weight due to the complexity of negative pressure paths and refrigerant channels within hollow rib structures, which complicates the arrangement of pipes and interferes with the rib structure, impairing both stiffness and weight efficiency.
Innovation Solution
A stage apparatus design featuring a plate structure with multiple members that include concave portions forming channels along surfaces, allowing independent communication of chucking holes with cooling and suction channels, thereby simplifying the layout and reducing the need for pipes within the stage plate, enhancing stiffness and light weight.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a through hole is formed in a thick stage plate to communicate with chucking holes, then negative pressure suction can be performed, but the light weight of the stage movable portion is impaired
Solution Approach 1:
The stage plate is divided into multiple thin plate members stacked together instead of using a single thick plate. This segmentation allows negative pressure paths to be formed in the gaps between plate members without requiring thick sections, thereby maintaining light weight while enabling chucking function.
Solution Approach 2:
The negative pressure path is arranged in the thickness direction by utilizing gaps between stacked plate members, rather than forming horizontal through-holes in a single thick plate. This dimensional arrangement enables communication with chucking holes while keeping each plate member thin and lightweight.
2Ease of manufacture
If the stage plate is made thick to form through holes for negative pressure paths, then communication with chucking holes is achieved, but the light weight of the stage movable portion is impaired
Solution Approach 1:
The stage plate is segmented into multiple thin plate members stacked together. Negative pressure paths are formed in the gaps between these members rather than drilling through-holes in a thick plate, achieving the same communication function with much lighter construction.
Solution Approach 2:
Multiple thin plate members are nested stacked together to form the stage plate structure. The negative pressure paths are formed in the interstitial gaps between these nested plates, eliminating the need for thick sections while maintaining structural integrity and chucking functionality.
3Temperature
If refrigerant channels are formed in the joint surface of the stage plate with hollow rib structure, then thermal deformation influence is reduced, but the negative pressure path becomes complicated and stiffness is impaired
Solution Approach 1:
The stage plate is segmented into multiple plate members with gaps between them. Negative pressure paths are formed in these gaps rather than cutting channels through the hollow rib structure, preserving the rib structure's stiffness while enabling both refrigerant flow and negative pressure suction.
Solution Approach 2:
The negative pressure path function is extracted from the main body of the stage plate and placed in the gaps between plate members. This separation allows the hollow rib structure to maintain its stiffness without being compromised by complex internal channel arrangements.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This design improves the stage apparatus's ability to maintain high stiffness and light weight, enabling efficient substrate positioning and thermal management while minimizing the complexity of pipe arrangements and weight increase.
Implementation Method 1
at least one surface out of a first surface of the first plate member on a side of the second plate member and a second surface of the second plate member on a side of the first plate member includes a first concave portion configured to form a first channel extending in a direction along the surface
Implementation Method 2
a stage apparatus which holds a substrate via a chuck with a chucking hole for chucking the substrate
Data Source
AI summary
The present invention provides a stage apparatus including a plate, wherein the plate includes a first plate member, a second plate member, and a third plate member, at least one surface out of a first surface of the first plate member on a side of the second plate member and a second surface of the second plate member on a side of the first plate member includes a first concave portion configured to form a first channel extending in a direction along the surface, at least one surface out of a third surface of the second plate member on a side of the third plate member and a fourth surface of the third plate member on the side of the second plate member includes a second concave portion configured to form a second channel extending in a direction along the surface.