Segmented Substrate Cleaning Member with Adjustable Contact Force
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Existing substrate cleaning technologies face inefficiencies in performing both polishing and cleaning processes with a single member, as the contact force distribution and material properties limit the ability to switch between these processes effectively.
Innovation Solution
A substrate cleaning member comprising a first polishing member and a second cleaning member with different surface roughness and hardness, supported by a softer lower-layer member, allowing the cleaning member to adjust its position relative to the polishing member upon contact force, enabling both polishing and cleaning operations with improved efficiency.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If a single member is used for both polishing and cleaning, then device complexity is reduced, but the ability to effectively switch between processes deteriorates due to contact force distribution and material property limitations
Solution Approach 1:
The single cleaning member is segmented into two distinct functional members: a first member with a first contact surface for polishing, and a second member with a second contact surface for cleaning. This segmentation allows each member to be optimized for its specific function while still operating within a unified cleaning apparatus, resolving the contradiction between structural simplicity and process versatility.
Solution Approach 2:
The first and second contact surfaces are designed with different local qualities - different surface roughness and hardness characteristics - to optimize each for its specific function. The first contact surface has properties suitable for polishing, while the second contact surface has properties optimized for cleaning, allowing effective performance of both processes with a single integrated member structure.
2Reliability
If the second contact surface has different surface roughness and hardness from the first contact surface, then cleaning effectiveness is improved, but manufacturing complexity increases
Solution Approach 1:
The first and second contact surfaces are designed with asymmetric properties - different surface roughness and hardness values - to optimize each for its specific function. The first contact surface has higher hardness and smoother finish for polishing, while the second contact surface has lower hardness and different roughness for effective cleaning, accepting increased manufacturing complexity as necessary for achieving superior functional performance.
Solution Approach 2:
The cleaning member utilizes composite material construction with different materials or material treatments for the first and second contact surfaces. This allows each surface to have optimized material properties for its specific function while being part of an integrated member, balancing manufacturing feasibility with functional effectiveness.
3Adaptability or versatility
If the lower-layer member is made of softer material than the second member, then adaptability in contact force distribution is improved, but structural strength deteriorates
Solution Approach 1:
The cleaning apparatus merges a softer lower-layer member with a harder second member to create a composite structure that exhibits both adaptability and strength. The softer lower-layer member provides adaptability in contact force distribution and positional adjustment, while the harder second member maintains structural strength and durability, resolving the contradiction between softness for adaptability and hardness for strength.
Solution Approach 2:
The system utilizes parameter changes in material hardness across different layers - the lower-layer member has lower hardness for adaptability, while the second member has higher hardness for strength. This gradient in material parameters allows the structure to simultaneously achieve force distribution adaptability and structural integrity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration allows for efficient execution of both polishing and cleaning processes with a single member, enhancing process efficiency by adjusting contact forces and material properties to ensure effective surface interaction.
Implementation Method 1
the lower-layer member is made of a softer material than the second member such that, when the second member receives a contact force from the main surface, a position of the second contact surface approaches a position of the first contact surface in the axial direction
Data Source
AI summary
A substrate cleaning member includes: a first member including a first contact surface, wherein the first member is configured to clean or polish a main surface of a substrate by moving the first contact surface along the main surface while the first contact surface is in contact with the main surface; a second member including a second contact surface, wherein the second member is configured to clean the main surface by moving the second contact surface along the main surface while the second contact surface is in contact with the main surface; a lower-layer member configured to support the second member such that the second contact surface protrudes beyond the first contact surface in an axial direction in which the predetermined axis extends; and a base configured to support the first member, the second member and the lower-layer member.