Segmented Raw Material Supply Unit for Silicon Ingot Growth

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Solution Overview

Problem

Conventional raw material supply units for single-crystal silicon ingot growth apparatuses face issues with raw material splashing and process complexity due to large volume supplies, leading to increased process time and potential equipment damage.

Innovation Solution

A raw material supply unit with a body having a step structure on its lower surface and a valve with a conical shape, allowing for phased supply of raw materials through different regions, preventing splashing and reducing the need for frequent refilling or replacement.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If the size of the body is increased to supply a large amount of raw material at once, then the productivity is improved, but the raw material may collide with the lower surface of the body and the valve, causing equipment damage and process instability

Engineering Contradiction:
Improveraw material supply efficiencyVSAvoidprocess stability
Core Design Contradiction:
ProductivityVSReliability

Solution Approach 1:

The body is divided into multiple chambers (first chamber and second chamber) separated by a partition wall. Each chamber can supply raw material independently through its own valve, allowing the system to maintain high productivity while controlling the supply rate to prevent collisions and splashing that would damage equipment or destabilize the process.

Inventive Principle:
Principle #1Segmentation

2Ease of operation

If the valve is moved downwards to supply raw material, then the raw material supply function is achieved, but the raw material may be injected toward the silicon melt causing splashing and potential equipment damage

Engineering Contradiction:
Improveraw material supply functionVSAvoidsilicon melt splashing
Core Design Contradiction:
Ease of operationVSObject-affected harmful factors

Solution Approach 1:

The raw material supply is segmented into multiple chambers, each with controlled valve movement. This allows the raw material to be supplied in a more controlled manner, reducing the risk of splashing when the valve moves downward to inject raw material into the crucible.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Each chamber is equipped with its own valve and can operate independently. This local control allows precise management of raw material flow from each chamber, enabling the system to maintain ease of operation while minimizing harmful splashing effects on the silicon melt.

Inventive Principle:
Principle #3Local quality

3Reliability

If the body is refilled with raw material multiple times to prevent splashing, then the harmful effects are reduced, but the process becomes complicated and process time is lengthened

Engineering Contradiction:
Improveprocess stabilityVSAvoidprocess time
Core Design Contradiction:
ReliabilityVSLoss of time

Solution Approach 1:

The body is segmented into multiple chambers that can be filled independently. This allows the system to maintain process stability by controlling raw material supply from multiple chambers simultaneously or sequentially, eliminating the need for repeated refilling operations and reducing overall process time.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Multiple chambers are combined into a single integrated body structure. This merging allows the system to achieve both reliability (by controlling supply to prevent splashing) and efficiency (by supplying raw material from multiple chambers in one operation, avoiding repeated refilling cycles).

Inventive Principle:
Principle #5Merging (Combining)

Data Source

PatentUS12173426B2Raw material supply unit, and apparatus comprising same for growing single-crystal silicon ingot
Publication Date: 2024.12.24 SK SILTRON CO LTD
  • US12173426B2 patent drawing
  • US12173426B2 patent drawing
  • US12173426B2 patent drawing

AI summary

Provided is a raw material supply unit comprising: a main body having a space into which raw material is filled; a barrier for dividing the main body into two or more areas in the longitudinal direction; a rod extending from above the main body into the interior of same; and a valve, connected to the rod, for covering or exposing the lower portion of the main body, wherein the bottom surface of the main body has a step.