Segmented Susceptor Assembly for Rapid Temperature Transitions

Solution Overview

Problem

Existing susceptor designs are inadequate for processing substrates at multiple temperature ranges, requiring long times to heat or cool between processes due to high mass and limited temperature flexibility.

Innovation Solution

A susceptor assembly with multiple sections, including a low-mass, high-watt-density heating section and a high-mass heat sink section, allowing independent movement to rapidly change substrate temperatures between 10°C to 600°C.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Stability of the object's composition

If a high mass susceptor is used to maintain constant temperature, then temperature stability is improved, but the time to heat or cool between processes increases

Engineering Contradiction:

Improvetemperature stabilityVSAvoidtransition time between processes

Core Design Contradiction:

Stability of the object's compositionVSLoss of time

Solution Approach 1:

The susceptor is divided into multiple sections with different masses and thermal properties. A first susceptor section has higher mass for temperature stability during processing, while a second susceptor section has lower mass for rapid heating and cooling transitions. This segmentation allows the system to achieve both temperature stability during operations and fast transition times between processes.

Inventive Principle:

Principle #1Segmentation

2Temperature

If a susceptor is designed for high temperature processes with high mass and high watt density, then high temperature processing capability is improved, but it is not ideal for lower temperature processes

Engineering Contradiction:

Improvehigh temperature processing capabilityVSAvoidtemperature range adaptability

Core Design Contradiction:

TemperatureVSAdaptability or versatility

Solution Approach 1:

The susceptor configuration is made dynamic by allowing selective positioning of different susceptor sections. The first susceptor section (high mass, high watt density) can be positioned for high temperature processes, while the second susceptor section (lower mass) can be positioned for lower temperature processes. This dynamic reconfiguration enables the system to adapt to different temperature requirements.

Inventive Principle:

Principle #15Dynamics

Solution Approach 2:

Different sections of the susceptor are designed with different local qualities - the first section has high mass and high watt density optimized for high temperature processes, while the second section has lower mass optimized for lower temperature processes. Each section has properties tailored to its specific function, allowing versatile temperature range coverage.

Inventive Principle:

Principle #3Local quality

3Temperature

If a susceptor is designed for lower temperature processes with high mass and lower watt density, then lower temperature processing capability is improved, but it is not ideal for high temperature processes

Engineering Contradiction:

Improvelower temperature processing capabilityVSAvoidtemperature range adaptability

Core Design Contradiction:

TemperatureVSAdaptability or versatility

Solution Approach 1:

The susceptor configuration is made dynamic by allowing selective positioning of different susceptor sections. The first susceptor section (high mass, high watt density) can be positioned for high temperature processes, while the second susceptor section (lower mass) can be positioned for lower temperature processes. This dynamic reconfiguration enables the system to adapt to different temperature requirements.

Inventive Principle:

Principle #15Dynamics

Solution Approach 2:

Different sections of the susceptor are designed with different local qualities - the first section has high mass and high watt density optimized for high temperature processes, while the second section has lower mass optimized for lower temperature processes. Each section has properties tailored to its specific function, allowing versatile temperature range coverage.

Inventive Principle:

Principle #3Local quality

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enables rapid and precise temperature control within a reaction chamber, facilitating multiple processes at different temperatures, thereby improving processing efficiency and reducing transition times.

Implementation Method 1

the susceptor first section can be formed of a first material and the susceptor second section can be formed of a second material... the susceptor first section can be formed of a relatively low mass and/or high watt density heating material

Methodology Applied

Scientific EffectResistive heating: Joule Heating

Implementation Method 2

The susceptor second section material can be, for example, a heat sink, and can be cooled with a fluid, such as water

Methodology Applied

Scientific EffectHeat sink: Heat Sink

Implementation Method 3

The susceptor second section material can be, for example, a heat sink, and can be cooled with a fluid, such as water

Methodology Applied

Scientific EffectFluid cooling: Convection

Data Source

PatentUS11795545B2Multiple temperature range susceptor, assembly, reactor and system including the susceptor, and methods of using the same

Publication Date: 2023.10.24 ASM IP HLDG BV

AI summary

Susceptor assemblies, reactors and systems including the assemblies, and methods of using the assemblies, reactors, and systems are disclosed. Exemplary susceptor assemblies include two or more sections that can be moved relative to each other to allow rapid changes in a substrate temperature. The movement of the two or more sections can additionally or alternatively be used to manipulate conductance of gas flow through a reactor.