Segmented Thermal Regulator for Substrate Stage Temperature Control
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Solution Overview
Problem
Existing thermal regulators for substrate processing stages lack efficient temperature control mechanisms, particularly in dividing the stage into segments with independent heating and sensing, leading to suboptimal temperature management across the substrate.
Innovation Solution
A thermal regulator system comprising a stage divided into first and second segments with embedded heaters and thermal sensors, a controller to manage heater output based on sensor readings, and a segment switch to synchronize temperature control across sets of segments, allowing for precise temperature control in both radial and circumferential directions.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If the stage is divided into multiple segments with independent heaters and thermal sensors in each segment, then temperature control precision is improved, but device complexity and cost increase
Solution Approach 1:
The stage is divided into multiple segments in the circumferential direction, with each segment having independent temperature control capability. This segmentation allows precise temperature control in different regions while maintaining a manageable system structure by grouping control functions.
Solution Approach 2:
A single thermal sensor in the first segment controls multiple heaters across different segments (first segment heater, second segment heater, third segment heater). This multi-functional control reduces the total number of sensors needed while maintaining temperature control precision across all segments.
2Measurement precision
If thermal sensors are provided in each segment, then temperature monitoring accuracy is improved, but the number of components and calculation load increase
Solution Approach 1:
One thermal sensor in the first segment serves multiple purposes by monitoring temperature for controlling heaters in multiple segments. This universal sensing approach reduces the total number of thermal sensors required while maintaining accurate temperature monitoring across the entire stage.
Solution Approach 2:
The temperature monitoring function is merged into a single thermal sensor that oversees multiple segments, combining what would otherwise require separate sensors. This merging reduces component quantity while preserving monitoring accuracy through centralized control.
3Manufacturing precision
If independent temperature control is implemented for each segment, then temperature uniformity is improved, but control system complexity increases
Solution Approach 1:
The stage is segmented into multiple regions with independent heating capability, allowing temperature uniformity to be maintained across different areas. The segmentation enables localized temperature adjustment while the control system manages complexity through structured organization of control functions.
Solution Approach 2:
The thermal sensor provides real-time temperature feedback to the control unit, which adjusts heater output accordingly. This feedback mechanism ensures temperature uniformity across segments while the control unit manages the complexity of coordinating multiple heaters through a centralized decision-making process.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution enables finer temperature control in the circumferential direction and coarser control in the radial direction, reducing the number of thermistors and heaters needed, thereby reducing calculation load and costs while improving temperature uniformity across the substrate.
Implementation Method 1
a plurality of heating elements arranged in a segment in a circumferential direction of the stage, and a plurality of thermistors arranged in the segment
Data Source
AI summary
A thermal regulator for controlling temperature of a substantially circular stage comprising a plurality of first segments and a plurality of second segments in a radial direction and in a circumferential direction, each of the first segments and at least two adjacent second segments defining a set of segments, the thermal regulator includes heaters disposed in the first and second segments, respectively, thermal sensors disposed in the first segments, respectively, a controller configured to control the heaters in response to temperatures determined by the thermal sensors, and a segment switch to switch the second segments to be controlled in conjunction with the first segment in each set of segments.