Segmented Vibration Isolator Structure for Stable Load Transfer
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Solution Overview
Problem
Conventional vibration isolators for semiconductor manufacturing equipment have limitations in durability and vibration characteristics due to their unitary structure, which requires large installation spaces and generates dust, and fail to effectively couple equipment support cells to the floor, leading to decreased durability and limited vibration absorption.
Innovation Solution
A separable integrated type vibration isolator with divided units featuring casings, reinforcing bars, and fillers with controlled elastic modulus, along with connection and shear keys, and damping pads, to enhance coupling forces, prevent backlash, and improve damping performance, allowing for stable load transfer and resonance control.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Stability of the object's composition
If a unitary body structure is used for the vibration isolator, then the structural integrity is improved, but a large installation space is required and dust is generated
Solution Approach 1:
The vibration isolator is divided into multiple separate equipment support cells that can be independently manufactured and assembled. Each cell has a standardized size, allowing flexible arrangement to achieve the required support capacity while reducing individual cell dimensions and total installation space. The segmented structure also eliminates dust generation during manufacturing compared to casting a large unitary body.
2Area of stationary object
If equipment support cells are separated, then installation space is reduced and dust generation is minimized, but coupling force between cells is insufficient
Solution Approach 1:
Cell connection units are embedded within the equipment support cells during manufacturing. The connection units include protrusions that fit into corresponding recesses in adjacent cells, creating strong mechanical interlocking. This nested integration ensures sufficient coupling force between separated cells while maintaining the space-efficient segmented structure.
3Force
If bolt fastening holes are formed on equipment support cells to couple to floor structure, then the cells can be anchored to the floor, but durability of the cells is decreased
Solution Approach 1:
Reinforcing bars are pre-embedded within the equipment support cells during manufacturing, extending from the cell bodies. These pre-positioned reinforcing bars are designed to interface with the floor structure, eliminating the need for bolt fastening holes in the cell surfaces. This preliminary integration of anchoring elements maintains cell durability while providing secure floor coupling.
4Adaptability or versatility
If equipment support cells are separated into multiple units, then installation flexibility is improved, but vibration characteristics are limited
Solution Approach 1:
Multiple equipment support cells are connected through cell connection units that integrate the cells into a unified structural system. The connection units include reinforcing bar connections that merge the vibration resistance capabilities of individual cells into a coordinated system, maintaining excellent vibration characteristics while preserving the installation flexibility of the segmented structure.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution improves durability and vibration characteristics by minimizing differences in elastic modulus between fillers and concrete, preventing backlash, and enhancing damping performance, thereby stabilizing load transfer and controlling resonance responses.
Implementation Method 1
the fillers have an elastic modulus of 50 to 200% of the concrete cast in the accommodation spaces
Implementation Method 2
allowing the reinforcing bars to perform dynamic elastic modulus restoring functions with respect to vibrations well
Implementation Method 3
capable of improving damping performance of the divided vibration isolator units, thereby controlling resonance response
Data Source
AI summary
A separable integrated type vibration isolator includes: divided vibration isolator units comprising casings having accommodation spaces formed open on tops thereof and reinforced concrete comprising reinforcing bars arranged in the accommodation spaces and the connection spaces and concrete cast in the accommodation spaces; casing connection parts for connecting the casings of the divided vibration isolator units to each other; reinforcing bar connection parts for connecting the reinforcing bars exposed to the connection spaces of the neighboring divided vibration isolator units to each other; and fillers adapted to be cast in the connection spaces where the plurality of divided vibration isolator units is connected to form reinforced concrete.