Segmented Rare Gas Recovery for Near-Zero Xenon Loss
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Solution Overview
Problem
The existing systems for rare gas recovery in semiconductor processing suffer from inefficiencies, resulting in significant loss of valuable gases like xenon, which increases the long-term cost of ownership due to high flow rates and continuous operation, limiting the recovery efficiency to 90% to 99.9% with residual gases being vented or removed.
Innovation Solution
A system comprising a process chamber and a recovery unit that includes multiple columns and storage tanks connected via gas supply and loopback lines, utilizing techniques such as pressure swing adsorption, vacuum swing adsorption, temperature swing adsorption, and cryogenic distillation to separate and recycle rare gases like xenon and krypton with minimal loss, allowing for variable flow rates and optimized recovery efficiency.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Loss of substance
If conventional gas recovery systems are used, then some rare gas recovery is achieved, but residual rare gas is lost when buffer gas is vented, limiting recovery efficiency to 90%-99.9%
Solution Approach 1:
The gas mixture is separated into multiple components using sequential separation stages. A first separation unit divides the mixture into a first fraction containing rare gas and a second fraction containing buffer gas. A second separation unit further processes the first fraction to extract additional rare gas. This segmented approach enables near-complete rare gas recovery while maintaining high recovery efficiency.
Solution Approach 2:
The system implements continuous operation where the first and second separation units work in sequence to continuously extract rare gas from the gas mixture. The loopback line returns processed gas to the separation units, maintaining continuous circulation and extraction. This continuous action ensures minimal rare gas loss while achieving sustained high recovery efficiency.
2Productivity
If high flow rates are used for continuous operation, then productivity is maintained, but the cost of ownership increases due to significant rare gas loss
Solution Approach 1:
The system recovers rare gas that would otherwise be discarded with the buffer gas vent. The first separation unit isolates rare gas from the buffer gas mixture, and the second separation unit further purifies and recovers additional rare gas from the first fraction. This recovery process eliminates rare gas loss while maintaining continuous high-flow operation and productivity.
3Device complexity
If a single separation unit is used, then device complexity is reduced, but recovery efficiency cannot be optimized and rare gas loss increases
Solution Approach 1:
The gas mixture is separated into multiple components using sequential separation stages. A first separation unit divides the mixture into a first fraction containing rare gas and a second fraction containing buffer gas. A second separation unit further processes the first fraction to extract additional rare gas. This segmented approach enables near-complete rare gas recovery while maintaining high recovery efficiency.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The system achieves virtually no loss of rare gases, reducing the cost of ownership and enabling operation at variable gas supply flow rates while maintaining constant optimized recovery conditions, with multiple process chambers able to share a single recovery unit.
Implementation Method 1
The recovery unit can use at least one of pressure swing adsorption, vacuum swing adsorption, or temperature swing adsorption.
Implementation Method 2
The recovery unit can use at least one of pressure swing adsorption, vacuum swing adsorption, or temperature swing adsorption.
Implementation Method 3
The recovery unit can use at least one of pressure swing adsorption, vacuum swing adsorption, or temperature swing adsorption.
Implementation Method 4
The recovery unit can use cryogenic distillation.
Implementation Method 5
The gas exhaust line can include a vacuum pump.
Data Source
AI summary
A process chamber, such as for semiconductor processing equipment, is connected with a recovery unit. The recovery unit includes a first storage tank for buffer gas and a second storage tank for rare gas. Both storage tanks are connected with a column in the recovery unit. The recovery unit and process chamber can operate as a closed system. The rare gas can be transported at a variable flow rate while separation in the recovery unit operates at a constant flow condition.