Segmented X-ray Optics for High-Throughput Grazing Incidence Reflection
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Solution Overview
Problem
There is a lack of viable materials for fabricating refractive optical elements for EUV and X-ray spectral ranges due to significant absorption, necessitating the use of reflective or diffractive elements, which require strict surface roughness and are challenging to manufacture, especially for high aspect ratio and curved surfaces. Additionally, condenser zone plates have limited throughput, making higher throughput optical elements desirable for sources like plasma-based radiation.
Innovation Solution
The construction of optical apparatuses from individually fabricated segments with precision alignment, using techniques like machining, electroforming, and polishing, allows for greater design freedom and improved surface roughness, enabling the creation of high-aspect ratio grazing incidence reflective devices with higher throughput and reduced manufacturing complexity.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If reflective optical elements are used for EUV and X-ray wavelengths, then material absorption is avoided, but surface roughness requirements become extremely strict and manufacturing complexity increases
Solution Approach 1:
The patent divides the optical element into multiple segments that can be manufactured separately and then assembled. This segmentation allows each individual segment to be manufactured with standard techniques while achieving the required overall surface roughness when assembled, thereby resolving the contradiction between optical performance and manufacturing ease.
2Shape
If high aspect ratio curved surfaces are fabricated using traditional machining, then desired geometry is achieved, but surface roughness control becomes extremely difficult
Solution Approach 1:
By segmenting the high aspect ratio curved surface into multiple smaller sections, each segment can be machined independently with better surface finish control. The segments are then assembled to form the complete curved geometry, achieving both the desired shape and surface roughness that would be impossible with a single monolithic component.
3Productivity
If condenser zone plates are used for focusing, then EUV and soft X-ray focusing is achieved, but throughput is limited
Solution Approach 1:
The patent replaces the diffractive zone plate mechanism with a reflective optical system using segmented mirrors. This substitution eliminates the inherent throughput limitations of zone plates while maintaining the focusing capability, thereby achieving high throughput without sacrificing optical performance.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This segmented approach provides superior optical performance by allowing for more precise alignment and surface finishing, achieving higher throughput and reduced surface roughness, addressing the limitations of monolithic structures and zone plates in EUV and X-ray optics.
Implementation Method 1
reflective or diffractive optical elements are typically used for wavelengths of radiation shorter than approximately 110 nm
Implementation Method 2
high-aspect ratio grazing incidence reflective devices
Data Source
AI summary
Described are optical apparatuses and methods for forming optical apparatuses. The optical apparatus includes a plurality of individually fabricated segments and a holder. Each of the plurality of individually fabricated segments include an inner annular surface and an outer contact surface opposite to the inner annular surface. Each of the inner annular reflecting surfaces define a longitudinal segment axis. The holder contacts each of the outer contact surfaces of the plurality of individually fabricated segments. Each of the longitudinal segment axes of the plurality of individually fabricated segments are linearly aligned.