Seismic-Resilient Support Construction for Microscopic Fabrication
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Existing support constructions for microscopic fabrication equipment are susceptible to damage from earthquakes and earth tremors due to their rigid design, which fails to decouple dynamic forces from sensitive modules effectively, leading to costly repairs and accuracy issues.
Innovation Solution
A support construction that combines a rigid element with a resilient element, where the resilient element absorbs dynamic forces exceeding a predetermined threshold, mechanically uncoupling the foundation's dynamics from the equipment, while maintaining rigidity for normal operation and allowing precise control of material properties.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Stability of the object's composition
If a rigid fixing element is used to anchor equipment on a foundation body, then the equipment achieves high stability and rigidity for precise operation, but the equipment becomes susceptible to damage from seismic forces and foundation movements
Solution Approach 1:
The fixing element transitions from a static rigid structure to a dynamic system where the rigidity characteristic changes based on loading conditions. The rigid element maintains high rigidity under normal static loads but becomes flexible under dynamic seismic forces exceeding a threshold value, allowing the system to adapt its mechanical properties to different operational states.
Solution Approach 2:
The rigidity parameter of the fixing element is changed from constant to variable. The rigid element's rigidity decreases significantly when dynamic force exceeds a predetermined threshold, transforming the support construction from a purely rigid system to one with controllable rigidity that can protect equipment during seismic events while maintaining stability during normal operation.
2Manufacturing precision
If the rigid element has high rigidity to maintain equipment accuracy, then displacement precision is improved, but the dynamic behavior becomes unpredictable under seismic loading
Solution Approach 1:
The fixing element is pre-designed with specific material properties and geometric characteristics that define its threshold behavior. The rigidity decrease at threshold exceedance is built into the element's structure and material selection, allowing predictable transition from rigid to flexible state under seismic loading while maintaining precise positioning during normal operation.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution effectively reduces equipment damage from seismic activity by decoupling dynamic forces, maintaining accuracy and reducing repair costs, while allowing for precise control of the rigidity characteristics of the rigid element.
Implementation Method 1
a resilient element whose rigidity decreases significantly when applying a dynamic force to the fixing element which force exceeds a predetermined threshold value
Data Source
AI summary
The invention relates to a support construction (1) for fabrication equipment of microscopic structures, comprising a monolithic foundation body (3) on which, for fixing the fabrication equipment, a fixing element (6) is provided comprising a resilient element. The fixing element further comprises a rigid element (10) whose rigidity decreases significantly when applying a dynamic force to the fixing element which force exceeds a predetermined threshold value. The support construction is further designed such that, regardless of the size of the dynamic force applied to the fixing element, a static force applied to the fixing element is substantially transmitted via the resilient element to the foundation body.