Selective Adhesive Transfer of Micro-Devices for Parallel MicroLED Placement

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Solution Overview

Problem

The manufacturing of microLED panels with micron-scale LEDs based on III-V semiconductor technology faces challenges such as technical and manufacturing hurdles, particularly in depositing and growing III-V semiconductor microLEDs directly on a final display substrate, and is difficult to produce in curved or bendable displays.

Innovation Solution

A method for transferring micro-devices involves selectively treating an adhesive layer on a donor substrate to create treated and untreated portions, using illumination to neutralize the adhesive, allowing for precise and high-throughput transfer of micro-devices to a destination substrate, enabling the use of microLEDs in multi-color displays and flexible displays.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If microLEDs are deposited and grown directly on a final display substrate using III-V semiconductor technology, then the display can achieve high brightness and efficiency, but the manufacturing process faces technical hurdles and is difficult to implement for curved or bendable displays

Engineering Contradiction:
Improvedisplay performanceVSAvoidmanufacturing difficulty
Core Design Contradiction:
ReliabilityVSEase of manufacture

Solution Approach 1:

The manufacturing process is divided into separate stages: first fabricating microLEDs on a donor substrate, then transferring them to the final display substrate. This segmentation allows each substrate to be optimized for its specific function - the donor substrate for high-quality LED growth and the final substrate for display performance including curvature requirements.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

A transfer substrate acts as an intermediary between the donor substrate and final display substrate. The microLEDs are grown on the donor substrate, transferred to the transfer substrate, and then moved to the final display substrate. This intermediary enables complex manufacturing sequences while maintaining high display performance.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Manufacturing precision

If micro-devices are transferred using traditional sequential methods, then each device can be precisely placed, but the manufacturing throughput is low and time-consuming

Engineering Contradiction:
Improvedevice placement precisionVSAvoidmanufacturing throughput
Core Design Contradiction:
Manufacturing precisionVSProductivity

Solution Approach 1:

Multiple microLEDs are transferred simultaneously in a single operation rather than sequentially. The illumination system activates adhesive regions in parallel, allowing hundreds or thousands of devices to be transferred at once while maintaining precise placement through patterned illumination control.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The adhesive layer is pre-patterned with treatable and untreated regions before transfer. This preliminary configuration allows selective release of microLEDs from the donor substrate at predetermined locations, enabling high-throughput parallel transfer with precise spatial control.

Inventive Principle:
Principle #10Preliminary action

3Ease of operation

If the adhesive layer is uniformly treated to release all micro-devices, then transfer is simplified, but selective placement on different substrate regions becomes impossible

Engineering Contradiction:
Improvetransfer process simplicityVSAvoidselective placement capability
Core Design Contradiction:
Ease of operationVSAdaptability or versatility

Solution Approach 1:

The adhesive layer has non-uniform properties with distinct treatable and untreated regions. This local differentiation enables selective release of microLEDs from specific areas while maintaining adhesion in other areas, allowing versatile placement patterns including partial transfers, selective device types, and complex spatial arrangements.

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

Instead of treating the entire adhesive layer, only specific portions are treated to release microLEDs. This partial action approach provides precise spatial control over which devices are transferred and where they are placed, while the untreated portions maintain adhesion for subsequent operations or different device types.

Inventive Principle:
Principle #16Partial or excessive action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This method increases throughput, reduces manufacturing time and cost, allows for higher spatial density of micro-devices, and facilitates the production of flexible and multi-color displays, including those with III-V semiconductor technology.

Implementation Method 1

The first adhesive layer is exposed to illumination in a region that overlaps at least some of the treated portion and at least some of the untreated portion, and exposing the first adhesive layer to illumination neutralizes the at least some of the untreated portion

Methodology Applied
Scientific EffectPhotochemical reaction: Photopolymerisation

Data Source

PatentUS11776989B2Methods of parallel transfer of micro-devices using treatment
Publication Date: 2023.10.03 APPLIED MATERIALS INC
  • US11776989B2 patent drawing
  • US11776989B2 patent drawing
  • US11776989B2 patent drawing

AI summary

A method of transferring micro-devices includes selectively treating a first adhesive layer to form a treated portion and an untreated portion while micro-devices are attached the first adhesive layer. A second adhesive layer on a second surface is placed to abut the micro-devices. The first adhesive layer is exposed to illumination in a region that overlaps at least some of the treated portion and at least some of the untreated portion. Exposing the first adhesive layer to illumination neutralizes the at least some of the untreated portion to create a neutralized portion that is less adhesive than an exposed area of the treated portion. The first surface is separated from the second surface such that micro-devices in the treated portion remain attached to the first surface and micro-devices in the neutralized portion are attached to the second surface and separate from the first surface.