Selective Micro-Transfer Printing for Fragile Device Assembly

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Solution Overview

Problem

Conventional methods for applying ultra-thin, fragile, or small devices to destination substrates are inefficient and prone to damage, as they are limited by the size and precision of pick-and-place technologies, making it difficult to handle micro-scale high-performance devices without causing harm.

Innovation Solution

Micro-transfer printing using a visco-elastic stamp with spatially distributed posts that can selectively adhere and detach micro-devices through controlled light irradiation, allowing for precise transfer and assembly of micro-scale devices onto non-native substrates without causing damage.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If conventional pick-and-place methods are used to apply ultra-thin, fragile, or small devices, then the process is simple and equipment is readily available, but the devices are prone to damage and handling precision is insufficient

Engineering Contradiction:
Improvedevice integrityVSAvoidtransfer process complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The transfer stamp is segmented into multiple posts arranged in an array, with each post capable of independently picking up and transferring individual micro-devices. This segmentation enables precise control over each device transfer while maintaining the ability to handle multiple devices simultaneously, thus improving reliability without excessive complexity

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

A compliant stamp made of elastomeric material serves as an intermediary between the source substrate and destination substrate. The stamp's viscoelastic properties enable it to conform to the fragile micro-devices during transfer, providing mechanical cushioning and reducing stress on the devices, thereby improving device integrity while managing process complexity

Inventive Principle:
Principle #24Intermediary (Mediator)

2Manufacturing precision

If micro-transfer printing with compliant stamps is used, then device handling precision is improved and damage is reduced, but the ability to selectively transfer specific devices is limited

Engineering Contradiction:
Improvedevice transfer precisionVSAvoidselective device transfer capability
Core Design Contradiction:
Manufacturing precisionVSAdaptability or versatility

Solution Approach 1:

Different regions of the stamp are assigned different functions: some posts are configured with specific geometries, materials, or surface properties that enable selective adhesion to particular device types or states. This local differentiation allows the stamp to selectively pick up and transfer specific devices from the source substrate while leaving others behind, thereby enabling adaptive transfer capabilities while maintaining high precision

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The stamp's viscoelastic properties provide dynamic response to varying transfer conditions. By controlling compression force, contact time, and withdrawal speed, the stamp can dynamically adjust its adhesion characteristics to selectively transfer devices based on their size, shape, or other properties, thus enhancing versatility while preserving manufacturing precision

Inventive Principle:
Principle #15Dynamics

3Productivity

If all devices on the source wafer are transferred, then productivity is maximized, but defective or unwanted devices cannot be excluded from the transfer

Engineering Contradiction:
Improvetransfer throughputVSAvoidfunctional device yield
Core Design Contradiction:
ProductivityVSReliability

Solution Approach 1:

The stamp is designed with posts that can be pre-configured or pre-positioned to correspond only to functional or desired devices on the source substrate. By performing selection before the transfer action, the system maintains high throughput by transferring multiple devices simultaneously while ensuring that only desirable devices are picked up, thus preserving both productivity and functional yield

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

The system incorporates feedback mechanisms that provide information about device quality or suitability before the transfer occurs. This feedback enables real-time or pre-transfer selection, allowing the stamp to adjust which devices are transferred based on their functional status, thereby maintaining high productivity while improving the yield of functional devices

Inventive Principle:
Principle #23Feedback

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Enables the deterministic removal and assembly of micro-scale devices onto substrates with high precision, ensuring completely functional printed structures and improving the yield of micro-transfer printing operations by selectively picking up and placing devices based on their characteristics.

Implementation Method 1

Micro-transfer printing using a visco-elastic stamp with spatially distributed posts that can selectively adhere and detach micro-devices through controlled light irradiation

Methodology Applied
Scientific EffectViscoelasticity: Viscoelasticity

Implementation Method 2

selectively adhere and detach micro-devices through controlled light irradiation

Methodology Applied
Scientific EffectLight irradiation: Light

Data Source

PatentUS11854855B2Micro-transfer printing with selective component removal
Publication Date: 2023.12.26 X DISPLAY CO TECH LTD
  • US11854855B2 patent drawing
  • US11854855B2 patent drawing
  • US11854855B2 patent drawing

AI summary

An example of a method of micro-transfer printing comprises providing a micro-transfer printable component source wafer, providing a stamp comprising a body and spaced-apart posts, and providing a light source for controllably irradiating each of the posts with light through the body. Each of the posts is contacted to a component to adhere the component thereto. The stamp with the adhered components is removed from the component source wafer. The selected posts are irradiated through the body with the light to detach selected components adhered to selected posts from the selected posts, leaving non-selected components adhered to non-selected posts. In some embodiments, using the stamp, the selected components are adhered to a provided destination substrate. In some embodiments, the selected components are discarded. An example micro-transfer printing system comprises a stamp comprising a body and spaced-apart posts and a light source for selectively irradiating each of the posts with light.