Selective Suction Control for Substrate Processing Liquid Piping
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
The existing substrate processing apparatuses face challenges in efficiently suctioning processing liquids from the processing liquid piping without increasing consumption and reducing throughput, as indiscriminate suctioning leads to excessive liquid consumption and prolonged processing times.
Innovation Solution
A substrate processing apparatus with a controller that executes selective suctioning steps, including a first suctioning step to position the processing liquid's leading end surface at a standby position and a second suctioning step to allow it to recede, using different suction forces and timing to optimize liquid removal while minimizing consumption and maintaining throughput.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If the processing liquid is thoroughly suctioned and drained outside the piping indiscriminately, then the leading end surface of the processing liquid is allowed to recede, but the processing liquid consumption is increased and the processing time is prolonged
Solution Approach 1:
The suction operation is applied selectively rather than uniformly. The controller determines whether to perform suction based on local conditions - specifically, whether the processing liquid has undergone deterioration. This selective application allows the system to prevent deterioration only when necessary, rather than always suctioning the processing liquid, thereby reducing unnecessary consumption.
Solution Approach 2:
The system dynamically adjusts its operation based on the state of the processing liquid. By monitoring whether the processing liquid has deteriorated (e.g., temperature change, composition change), the controller adapts the suction operation accordingly - performing suction only when deterioration is detected, and skipping it when the liquid is still usable.
2Reliability
If the processing liquid is thoroughly suctioned and drained outside the piping indiscriminately, then the leading end surface of the processing liquid is allowed to recede, but the processing time is prolonged and throughput is decreased
Solution Approach 1:
The suction operation is applied selectively rather than uniformly. The controller determines whether to perform suction based on local conditions - specifically, whether the processing liquid has undergone deterioration. This selective application allows the system to prevent deterioration only when necessary, rather than always suctioning the processing liquid, thereby reducing unnecessary processing time and maintaining throughput.
Solution Approach 2:
The system dynamically adjusts its operation based on the state of the processing liquid. By monitoring whether the processing liquid has deteriorated (e.g., temperature change, composition change), the controller adapts the suction operation accordingly - performing suction only when deterioration is detected, and skipping it when the liquid is still usable.
3Reliability
If the processing liquid inside the processing liquid piping is changed in composition (deterioration) or decreased in temperature, then the processing liquid cannot be used in the subsequent substrate processing, but thorough suctioning is required to drain it
Solution Approach 1:
The controller performs preliminary assessment of the processing liquid's state before initiating suction. By checking whether the processing liquid has undergone deterioration (composition change or temperature decrease) before the suction operation, the system can determine in advance whether suction is necessary, avoiding unnecessary suction operations and reducing time loss.
Solution Approach 2:
The system implements feedback control by monitoring the state of the processing liquid (composition, temperature) and using this information to control the suction operation. The controller receives feedback about the processing liquid's condition and adjusts the suction operation accordingly - performing suction only when the feedback indicates deterioration has occurred.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach reduces processing liquid consumption and prevents its deterioration, ensuring efficient substrate processing by selectively managing the suction process, thereby enhancing operational efficiency and reducing waste.
Implementation Method 1
a suction unit for suctioning the processing liquid present in an interior of the processing liquid piping
Data Source
AI summary
A substrate processing apparatus includes a substrate holder that holds a substrate, a processing liquid piping that is communicatively connected with a discharge port for discharging a processing liquid, a processing liquid supplier that supplies the processing liquid to the processing liquid piping, a suction unit for suctioning the processing liquid present inside the processing liquid piping, and a controller which controls the processing liquid supplying unit and the suction unit. The controller executes a processing liquid supplying step that supplies the processing liquid to the processing liquid piping and a suctioning step that suctions the processing liquid inside the processing liquid piping by the suction unit. The controller selectively executes a first suctioning step and a second suctioning step of the processing liquid.