Self-Aligned MEMS Optical Switch Assembly With Hermetic Light Cavity
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Solution Overview
Problem
Existing MEMS optical switches face challenges in achieving compact, high-integration designs with self-aligned mirror and fiber arrays, requiring complex assembly and calibration processes, and hermetic seals that compromise optical performance.
Innovation Solution
A self-aligned optical switching unit with a spacer structure enclosing light cavities, featuring aligned fiber and mirror arrays, and actuators for beam deflection, allowing for a compact, hermetically sealed, and easily aligned optical switch structure.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If traditional precision-machined fixtures are used to mount mirror and fiber arrays, then alignment precision can be achieved, but assembly complexity and time increase significantly
Solution Approach 1:
The spacer structure incorporates self-aligning features including alignment pins, recesses, and mechanical interfaces that automatically position the mirror array and fiber array relative to each other during assembly. This self-alignment mechanism eliminates the need for complex external alignment fixtures and manual calibration procedures, thereby reducing assembly complexity while maintaining alignment precision.
Solution Approach 2:
The spacer structure integrates multiple functions into a single component: it provides mechanical support, defines the light cavity, enables hermetic sealing, and incorporates self-aligning features. By combining these functions into one integrated structure rather than using separate fixtures for each function, the overall assembly complexity is reduced while maintaining the required alignment precision.
2Reliability
If hermetic seals are added to protect mirrors, then reliability improves, but optical performance deteriorates and process complexity increases
Solution Approach 1:
The spacer structure integrates the hermetic sealing function directly into its design, combining the structural support and sealing functions in a single component. The spacer walls themselves form the hermetic barrier, eliminating the need for separate sealing devices or additional sealing layers, thereby reducing process complexity while maintaining protection reliability.
3Reliability
If multiple separate components are used for high integration, then optical performance can be optimized, but the overall device size increases
Solution Approach 1:
The design nests the mirror array and fiber array within the enclosed light cavity defined by the spacer structure. The mirrors and fibers are positioned within the three-dimensional space of the spacer, utilizing vertical and lateral dimensions efficiently. This nested arrangement allows high integration of optical components while maintaining a compact overall device size, as the components are arranged in a space-efficient manner within the spacer boundaries.
Solution Approach 2:
The spacer structure creates a three-dimensional light cavity that utilizes vertical spacing between the mirror array and fiber array, rather than only lateral arrangement. This dimensional approach allows optical components to be positioned in three-dimensional space, enabling high integration density while maintaining optimal optical performance and keeping the device footprint compact.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution enables a compact, high-integration optical switch with enhanced optical performance and simplified fabrication, ensuring precise alignment and reduced assembly complexity.
Implementation Method 1
The light cavity extends between top surface and the bottom surface. A first input optical fiber array is attached to the top surface over the light cavity in proximity to the first end structure. A first mirror array is attached to the bottom surface over the light cavity
Implementation Method 2
A movable mirror in a switch mirror array redirects light beams to desired locations. A common way of moving the mirror is by electrostatic actuation using electrodes, which are positioned below the mirror. A voltage is applied to the electrodes that creates an electric field, which causes the mirror to pivot.
Implementation Method 3
The mirrors of the first mirror array are spatially aligned with optical fibers of the input optical fiber input array. A second mirror array is attached to the top surface over the light cavity in proximity to the second end structure. Optical fibers of the output optical fiber array are spatially aligned with mirrors of the second mirror array.
Data Source
AI summary
An optical switching array having multiple cells of MEMs optical switching units and methods of fabricating the array is disclosed. The switching unit includes a spacer structure having an enclosed light cavity. The light cavity is defined by a first end structure, a second end structure, and side structures each attached between the first and second end structure. A first input optical fiber array is attached to a top surface over the light cavity in proximity to the first end structure. A first mirror array is attached to a bottom surface over the light cavity in proximity to the first end structure. A second mirror array is attached to the top surface over the light cavity in proximity to the second end structure. An output optical fiber array is attached to the bottom surface over the light cavity in proximity to the second end structure.