Self-Aligning Interferometric Endpoint Housing for Plasma Chamber Assembly
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Solution Overview
Problem
Conventional interferometric endpoint housings in process chambers are often assembled in a blinded position, making integration and alignment with the substrate difficult, which complicates accurate measurement and process control in plasma processing.
Innovation Solution
The implementation of an interferometric endpoint housing assembly that includes a bracket with radially extending arms and biasing members, allowing for side-to-side deflection and alignment with the dome assembly, facilitating self-alignment of the IEP housing within the process chamber.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If the IEP housing is assembled in a fixed position, then the structure is simple and stable, but the alignment with the dome assembly becomes difficult and imprecise
Solution Approach 1:
The IEP housing structure transitions from a fixed rigid assembly to a dynamic self-aligning system. The biasing members enable the housing to deflect and adjust its position dynamically during assembly, allowing automatic alignment with the dome assembly while maintaining structural stability during operation.
Solution Approach 2:
The housing assembly incorporates self-aligning features where the biasing members automatically adjust the IEP housing position relative to the dome assembly during assembly. This self-service mechanism eliminates the need for complex external alignment tools or procedures, achieving precise alignment through the inherent design of the biasing system.
2Ease of manufacture
If the IEP housing is made rigid for stability, then measurement accuracy is maintained, but integration with the dome assembly becomes complex
Solution Approach 1:
The housing system is segmented into the IEP housing, bracket, and biasing members as separate components. This segmentation allows each component to be manufactured independently with standard tolerances, simplifying manufacturing while the assembled system achieves the required measurement reliability through the self-aligning mechanism.
Solution Approach 2:
The system utilizes controlled parameter changes in the biasing members (spring force, deflection amount) to enable temporary flexibility during assembly, then maintains rigid stability during measurement operations. The biasing members provide just enough compliance to facilitate easy assembly while ensuring measurement reliability when in operation.
Data Source
AI summary
Embodiments of interferometric endpoint (IEP) housing assemblies for endpoint detection of plasma processing are provided herein. In some embodiments, IEP housing assemblies include: an IEP housing having an upper end configured to interface with a light source and having an internal cavity, wherein a lower end of the IEP housing is configured to interface with a dome assembly of a process chamber; a bracket having a body disposed about the IEP housing and having a plurality of arms extending radially outward from the body; and a plurality of biasing members extending from the body to the IEP housing and configured to hold the IEP housing within the body while allowing side-to-side deflection.