Self-aligning vacuum feed-through for liquid nitrogen

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Solution Overview

Problem

Traditional EUV light source drum architectures are limited by the need to integrate nitrogen feed and exhaust tubes with the rotating drum, restricting possible designs and functionality.

Innovation Solution

The implementation of a rotatable drum with a feed tube situated within an exhaust tube, where a rotary air bearing allows the exhaust tube to rotate and translate with the drum, decoupling the nitrogen feed and exhaust from the drum's actuation, and using thermal insulation and a gimbal for additional flexibility and maintenance.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Device complexity

If nitrogen feed and exhaust tubes are integrated with the rotating drum, then the drum structure is simplified, but the possible drum architectures are limited

Engineering Contradiction:

Improvedrum structureVSAvoiddrum architectures

Core Design Contradiction:

Device complexityVSAdaptability or versatility

Solution Approach 1:

The nitrogen feed and exhaust functions are segmented from the drum rotation function. The drum rotates independently while the feed and exhaust tubes are supported by a separate bearing system, allowing independent optimization of each component.

Inventive Principle:

Principle #1Segmentation

Solution Approach 2:

A bearing system acts as an intermediary between the rotating drum and the stationary feed/exhaust tube support. This intermediary allows the tubes to remain stationary relative to the drum rotation, enabling flexible drum architectures without compromising structural simplicity.

Inventive Principle:

Principle #24Intermediary (Mediator)

2Ease of operation

If nitrogen feed and exhaust tubes run through the drum shaft, then the nitrogen handling is integrated, but the drum architecture flexibility is restricted

Engineering Contradiction:

Improvenitrogen handlingVSAvoiddrum architectures

Core Design Contradiction:

Ease of operationVSAdaptability or versatility

Solution Approach 1:

The feed and exhaust tube support is extracted from the drum shaft structure. By using a separate bearing system to support the tubes, the drum architecture is freed from the constraint of having tubes run through its shaft, enabling greater design flexibility.

Inventive Principle:

Principle #2Taking out (Extraction)

Solution Approach 2:

The bearing system serves multiple functions: it supports the stationary feed and exhaust tubes while allowing the drum to rotate freely. This multi-functional approach integrates nitrogen handling with drum operation without restricting architectural flexibility.

Inventive Principle:

Principle #6Universality (Multi-functionality)

3Adaptability or versatility

If the exhaust tube is decoupled from drum actuation, then drum architecture flexibility is improved, but the tube alignment precision may be compromised

Engineering Contradiction:

Improvedrum architecturesVSAvoidtube alignment

Core Design Contradiction:

Adaptability or versatilityVSManufacturing precision

Solution Approach 1:

The mechanical connection between the exhaust tube and drum actuation is replaced with a bearing-supported arrangement. This substitution maintains precise alignment through the bearing's inherent precision while allowing the tube to be decoupled from drum actuation for greater architectural flexibility.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The bearing system allows for precise control of the exhaust tube's positional parameters (alignment, offset, angle) independent of drum actuation. By adjusting these parameters during assembly, precise alignment is achieved while maintaining decoupling for architectural flexibility.

Inventive Principle:

Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This design allows for more flexible drum architectures, improved thermal management, and easier maintenance by decoupling the nitrogen handling from the drum's rotation and translation, enhancing the operational efficiency and versatility of EUV light sources.

Implementation Method 1

a rotary air bearing between the exhaust tube and the casing, to allow the exhaust tube to rotate with the rotatable drum

Methodology Applied

Scientific EffectAir bearing: Air Lubrication

Data Source

PatentUS11879683B2Self-aligning vacuum feed-through for liquid nitrogen

Publication Date: 2024.01.23 KLA CORP

AI summary

A light source includes a rotatable drum, an exhaust tube coupled to the rotatable drum to exhaust nitrogen gas from an interior of the rotatable drum, a feed tube situated within the exhaust tube to provide liquid nitrogen to the interior of the rotatable drum, and a casing to surround at least a portion of the exhaust tube. The light source also includes a rotary air bearing between the exhaust tube and the casing, to allow the exhaust tube to rotate with the rotatable drum.