Self-Biased Magnetic Circulator Integration in IC Chips

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Solution Overview

Problem

Traditional magnetic circulators are too large for integration in portable electronic devices due to their size, which is inversely proportional to the frequency of the signals they propagate, making them unsuitable for lower frequency applications.

Innovation Solution

A self-biased magnetic circulator is integrated into an integrated circuit chip by fabricating a magnetic circulator junction on a semiconductor wafer with a deep cavity in the insulating substrate filled with a ferromagnetic material, eliminating the need for an external magnet and allowing for a smaller form factor while maintaining high isolation between ports.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If a traditional magnetic circulator is used to provide signal routing and isolation, then the circulator function is achieved, but the device size becomes too large for integration in portable electronic devices

Engineering Contradiction:
Improvecirculator functionVSAvoidcirculator size
Core Design Contradiction:
ReliabilityVSVolume of moving object

Solution Approach 1:

The patent merges the circulator function with the semiconductor device by integrating a magnetic junction directly into the semiconductor chip. The magnetic junction is formed by depositing ferromagnetic material layers (CoFeB, CoFe) and patterning them into a cross-shaped geometry that provides circulator functionality within the same chip that contains the semiconductor active layer, eliminating the need for a separate discrete circulator component.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The patent implements nesting by placing the magnetic junction structure within cavities or recesses in the semiconductor substrate. The magnetic layers are deposited and patterned to form a compact cross-shaped junction that fits within the chip structure, with the magnetic functionality nested within the semiconductor device architecture rather than being a separate external component.

Inventive Principle:
Principle #7Nested doll (Nesting)

2Volume of moving object

If the circulator size is reduced for integration, then the device can be integrated in portable electronics, but the isolation between ports deteriorates

Engineering Contradiction:
Improvecirculator sizeVSAvoidisolation between ports
Core Design Contradiction:
Volume of moving objectVSReliability

Solution Approach 1:

The patent applies local quality by creating a highly localized magnetic field configuration at the magnetic junction. The cross-shaped magnetic structure with specific layer compositions (CoFeB, CoFe) and geometries generates concentrated magnetic flux density at the junction center, enhancing the non-reciprocal effect locally. This localized magnetic field enhancement maintains high isolation performance despite the overall small device size.

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The patent uses composite material structures in the magnetic junction, combining different ferromagnetic materials (CoFeB, CoFe) with specific magnetic properties. These composite magnetic layers are deposited in a stacked configuration to achieve optimized magnetic anisotropy and saturation magnetization, which enhance the non-reciprocal signal routing and port isolation performance within the compact integrated structure.

Inventive Principle:
Principle #40Composite materials

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The self-biased circulator provides high isolation between ports in a compact integrated circuit, enabling simultaneous signal transmission and reception over a single antenna without the need for an external magnet, suitable for microwave and high-frequency RF applications.

Implementation Method 1

A deep pocket or cavity is formed in an insulating substrate under the active layer. This cavity is then filled with a ferromagnetic material such that the circulator junction is self-biased within the integrated circuit chip

Methodology Applied
Scientific EffectFerromagnetism: Ferromagnetism

Implementation Method 2

The magnetic circulator includes a permanent magnet which causes signals to pass through its material along one direction, such that signals travel from the transmit port to the antenna port and from the antenna port to the receive port

Methodology Applied
Scientific EffectMagnetic field: Magnetic Field

Data Source

PatentUS11152677B2Integration of self-biased magnetic circulators with microwave devices
Publication Date: 2021.10.19 QORVO US INC
  • US11152677B2 patent drawing
  • US11152677B2 patent drawing
  • US11152677B2 patent drawing

AI summary

Integration of self-biased magnetic circulators with microwave devices is disclosed herein. In microwave and other high-frequency radio frequency (RF) applications, a magnetic circulator can be implemented with a smaller permanent magnet. Aspects disclosed herein include a process flow for producing a self-biased circulator in an integrated circuit chip. In this regard, a magnetic circulator junction can be fabricated on an active layer of a semiconductor wafer. A deep pocket or cavity is formed in an insulating substrate under the active layer. This cavity is then filled with a ferromagnetic material such that the circulator junction is self-biased within the integrated circuit chip, eliminating the need for an external magnet. The self-biased circulator provides high isolation between ports in a smaller integrated circuit.