Self-Centering Gasket for Semiconductor Fluid Pathways
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Solution Overview
Problem
Existing fluid pathway joints in semiconductor manufacturing face challenges with gasket damage during assembly, leading to leakage issues and the need for a large inventory of various gasket types due to complex retainer structures, which increase costs and complexity.
Innovation Solution
A single-piece, self-centering, malleable metallic gasket with inner and outer raised lips provides protection and alignment, minimizing the risk of damage during assembly and allowing for use in multiple joint types without the need for separate retainers.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If a separate retainer structure is used to hold and center the gasket during assembly, then gasket alignment consistency is improved, but device complexity and inventory requirements increase
Solution Approach 1:
The patent combines the gasket centering function directly into the gasket body by incorporating a centering protrusion that fits into a corresponding centering recess in the flange. This eliminates the need for a separate retainer structure, reducing device complexity while maintaining alignment consistency. The gasket itself becomes both the sealing element and the centering mechanism.
Solution Approach 2:
The gasket is designed with multiple functions integrated into a single component: sealing (through the sealing surface), centering (through the centering protrusion), and protection (through the raised lips). This multi-functional design eliminates the need for separate retainers and reduces inventory requirements while maintaining manufacturing precision.
2Manufacturing precision
If complex retainer structures are used for gasket centering, then alignment consistency is improved, but inventory requirements and costs increase
Solution Approach 1:
The patent designs a universal gasket with integrated centering features that can be used across multiple joint types. The centering protrusion and raised lips provide consistent alignment and protection without requiring different gasket variants for different applications, thereby reducing inventory requirements.
Solution Approach 2:
The patent extracts the centering function from separate retainer structures and integrates it directly into the gasket body. This eliminates the need to stock separate retainers and reduces the variety of gasket types needed, as the gasket itself provides all necessary functions.
3Ease of manufacture
If conventional gaskets without protection features are used, then ease of manufacture is improved, but risk of gasket damage during assembly increases
Solution Approach 1:
The patent incorporates raised lips and a centering protrusion during gasket manufacturing, before assembly occurs. These features preliminarily establish protection against damage and ensure proper alignment during subsequent assembly operations, preventing scratching and misalignment without complicating the manufacturing process.
Solution Approach 2:
The raised lips act as protective cushions that prevent direct contact between handling tools or mating surfaces and the critical sealing surface of the gasket. This beforehand protection reduces the risk of damage during assembly while maintaining manufacturing simplicity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The gasket effectively seals fluid pathways, reduces the risk of leakage, and simplifies inventory management by providing a versatile solution for various joint types, ensuring consistent alignment and protection without additional retainer structures.
Implementation Method 1
causing permanent plastic deformation of the ductile metallic gasket to create a seal that will resist leakage
Data Source
Figure 1A~2
Figure 3A~3D
Figure 4A~4D
AI summary
A malleable gasket suitable for high purity fluid delivery systems has flat axial end surface sealing regions on opposing sides, and further includes a raised inner lip on a first side and a raised outer lip on a second side. The raised lips align the gasket within a fluid delivery conduit by engaging features in the face of one or more fluid delivery elements joined together, and simultaneously provide protection to the sealing regions during normal handling and fluid delivery system assembly.