Self-centering Susceptor Ring Assembly Thermal Expansion
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Solution Overview
Problem
The existing susceptor ring assemblies in semiconductor processing tools experience uneven thermal expansion, leading to temperature non-uniformities and potential contact issues between the susceptor ring and susceptor, which can result in particle deposition and processing problems.
Innovation Solution
A self-centering susceptor ring assembly is designed with a susceptor ring support member and pins that slide within detents on the susceptor ring, allowing for even thermal expansion and contraction, maintaining the susceptor ring's center position and consistent gap spacing.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Stability of the object's composition
If the susceptor ring is fixed rigidly to the susceptor support member, then the structural stability is improved, but the thermal expansion uniformity deteriorates causing temperature non-uniformities
Solution Approach 1:
The patent applies the dynamics principle by replacing the rigid fixed connection with a dynamic mechanism consisting of pins that can slide within detents. This allows the susceptor ring to move dynamically in response to thermal expansion while maintaining structural stability, resolving the contradiction between rigidity and thermal adaptability.
Solution Approach 2:
The patent utilizes parameter changes by allowing the position of the pins within the detents to change in response to temperature variations. As the susceptor ring expands or contracts thermally, the pins slide to new positions within the detent slots, accommodating the dimensional changes while maintaining even spacing and temperature uniformity.
2Adaptability or versatility
If the susceptor ring is allowed to expand freely without constraints, then the thermal expansion freedom is improved, but the positioning precision deteriorates causing uneven gap spacing
Solution Approach 1:
The patent introduces an intermediary mechanism - the pins sliding within detents - that mediates between the susceptor ring's need for thermal expansion freedom and the requirement for precise gap spacing. The pins act as intermediaries that constrain the ring's movement to maintain precision while still allowing thermal expansion.
Solution Approach 2:
The dynamic sliding mechanism of pins within detents allows the system to adapt to thermal expansion while maintaining precise positioning. The pins can move dynamically to accommodate expansion while their constrained motion within the detent slots ensures the gap spacing remains uniform and precise.
3Stability of the object's composition
If the susceptor ring uses a snug fit with pins to prevent movement, then the positional stability is improved, but the thermal expansion capability deteriorates causing contact issues
Solution Approach 1:
The patent transforms the static snug fit into a dynamic sliding fit. Instead of a fixed connection that prevents all movement, the pins are designed to slide within the detent slots, providing positional stability through constraint while simultaneously enabling thermal expansion through controlled movement.
Solution Approach 2:
The connection mechanism is segmented into multiple components - the pins and the detent slots - that work together to provide both stability and expansion capability. The segmentation allows independent functions: the pins provide structural support and positioning, while the slots within detents allow controlled movement for thermal expansion.
4Manufacturing precision
If the susceptor ring assembly uses multiple pins and detents for positioning, then the positioning accuracy is improved, but the device complexity increases
Solution Approach 1:
The positioning system is segmented into simple, discrete elements - pins and detent slots - that can be manufactured independently and assembled straightforwardly. This segmentation achieves high positioning accuracy through the geometric relationship of these simple components without requiring complex mechanisms.
Solution Approach 2:
The pin-and-detent mechanism is self-aligning and self-adjusting. The pins automatically locate within the detent slots, and the sliding capability provides automatic adjustment for thermal expansion without requiring external control systems or complex adjustment mechanisms, thereby reducing overall device complexity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution ensures even thermal expansion and contraction of the susceptor ring, preventing temperature non-uniformities and contact issues, thereby improving the processing consistency and reducing particle generation during semiconductor manufacturing.
Implementation Method 1
The susceptor ring assembly 20 can absorb radiant energy to reduce or eliminate heat loss from the outer edge of the susceptor 16 and substrate 18 during processing
Implementation Method 2
When the temperature within the reaction chamber is raised and/or lowered, the various components within the reaction chamber thermally expand or contract accordingly
Implementation Method 3
When the temperature within the reaction chamber is raised and/or lowered, the various components within the reaction chamber thermally expand or contract accordingly
Data Source
AI summary
A self-centering susceptor ring assembly is provided. The susceptor ring assembly includes a susceptor ring support member and a susceptor ring supported on the susceptor ring support member. The susceptor ring support member includes at least three pins extending upwardly relative to the lower inner surface of the reaction chamber. The susceptor ring includes at least three detents formed in a bottom surface to receive the pins from the susceptor ring support member. The detents are configured to allow the pins to slide therewithin while the susceptor ring thermally expands and contracts, wherein the detents are sized and shaped such that as the susceptor ring thermally expands and contracts the gap between the susceptor ring and the susceptor located within the aperture of the susceptor ring remains substantially uniform about the entire circumference of the susceptor, and thereby maintains the same center axis.