Self-Centering Voltage Standoff for Precise Electrode Alignment

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Solution Overview

Problem

Traditional insulators in ion implantation systems often misalign during installation due to flat ends and loose fastening, requiring time-consuming fixtures and being prone to misalignment caused by thermal expansion differences.

Innovation Solution

A self-centering insulator design featuring a captive fastener with alignment features, such as tapered or cylindrical portions, that aligns with corresponding features on the electrode, ensuring precise positioning without external fixtures.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Manufacturing precision

If traditional flat-ended insulators with loose fasteners are used, then the installation process is simple, but the insulator misaligns during installation and operation

Engineering Contradiction:
Improvealignment precisionVSAvoidinsulator structure
Core Design Contradiction:
Manufacturing precisionVSDevice complexity

Solution Approach 1:

The insulator incorporates a spherical alignment feature (ball) that fits into a corresponding spherical depression on the electrode. This curved geometry enables self-centering during installation, ensuring precise alignment without requiring complex external fixtures. The spherical interface provides automatic positioning in multiple degrees of freedom while maintaining structural simplicity.

Inventive Principle:
Principle #14Spheroidality (Curvature)

2Manufacturing precision

If fixtures are used to align insulators during installation, then alignment precision is improved, but installation time increases

Engineering Contradiction:
Improvealignment precisionVSAvoidinstallation time
Core Design Contradiction:
Manufacturing precisionVSLoss of time

Solution Approach 1:

The insulator's alignment feature (spherical ball) and the electrode's corresponding depression work together to enable self-alignment during installation. The components automatically position themselves correctly through their geometric interface, eliminating the need for external alignment fixtures and reducing installation time while maintaining high precision.

Inventive Principle:
Principle #25Self-service

3Reliability

If flat-ended insulators are used, then the insulator structure is simple, but thermal expansion causes loosening and misalignment

Engineering Contradiction:
Improvealignment stabilityVSAvoidinsulator structure
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The spherical alignment feature embedded in the insulator body provides a geometric constraint that maintains alignment stability under thermal expansion. The ball-in-depression interface allows for thermal movement while maintaining proper positioning, preventing loosening and misalignment that occur with flat-ended designs during temperature variations.

Inventive Principle:
Principle #14Spheroidality (Curvature)

Data Source

PatentUS20240412899A1Self-centering voltage standoff
Publication Date: 2024.12.12 APPLIED MATERIALS INC
  • US20240412899A1 patent drawing
  • US20240412899A1 patent drawing
  • US20240412899A1 patent drawing

AI summary

An insulator that may be self-centering is disclosed. The insulator includes an alignment feature that allows it to self-center during installation. In some embodiments, the insulator is created with a captive fastener with a specific alignment feature. The internal cavity of the insulator is formed so as to have a corresponding alignment feature. When tightened, the captive fastener is pressed into the alignment feature of the internal cavity, allowing it to self-center. In other embodiments, the mating electrode is also modified to include a corresponding alignment feature. For example, in some embodiments, the alignment feature on the electrode comprises a specially shaped depression, while the insulator has a corresponding protrusion. In other embodiments, the insulator also has a protective shield.