Self-Contained Transfer Unit for Cleanroom Dust Suppression
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Solution Overview
Problem
Existing transfer apparatuses generate dust due to rubbing between accommodating members and wires/pipes, contaminating clean rooms in processing systems.
Innovation Solution
A transfer apparatus with a self-contained power and fluid supply system, including a battery, suction mechanism, and circulating water supply, eliminating the need for external wires and pipes, thereby reducing dust generation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If the transfer apparatus is connected to external power sources, air sources, and water sources via wires and pipes, then the transfer apparatus can perform its transfer function, but dust is generated due to rubbing between the accommodating member and wires/pipes, contaminating the clean room
Solution Approach 1:
The patent extracts and removes the wires and pipes from the transfer apparatus by providing a self-contained power source (storage battery) and fluid sources (air tank, water tank) integrated into the transfer unit. This eliminates the accommodating member that causes dust generation while preserving all necessary functions for transferring workpieces between processing units.
Solution Approach 2:
The transfer apparatus becomes self-sufficient by integrating a storage battery for power, air tank for air supply, and water tank for water supply directly into the transfer unit. This self-service capability eliminates the need for external connections via wires and pipes, thereby preventing dust generation from rubbing between the accommodating member and external conduits.
2Use of energy by moving object
If wires and pipes are routed externally from the transfer unit through an accommodating member, then power and fluids can be supplied to the transfer unit, but the rubbing between the accommodating member and wires/pipes generates dust that contaminates the clean room
Solution Approach 1:
The patent extracts the power supply and fluid supply functions from external sources and integrates them directly into the transfer unit. The storage battery, air tank, and water tank are now part of the transfer unit itself, eliminating the need for external wires and pipes that cause dust generation through rubbing with the accommodating member.
Solution Approach 2:
The transfer unit performs self-service by carrying its own power source (storage battery) and fluid sources (air tank, water tank). This eliminates dependency on external power and fluid supply lines, thereby removing the source of dust generation caused by the accommodating member rubbing against external wires and pipes.
3Productivity
If the transfer unit uses external power and fluid supply, then it can operate the holding portion moving mechanism and water supply mechanism, but it requires wires and pipes that generate dust when accommodated
Solution Approach 1:
The patent extracts all external supply lines (wires and pipes) by integrating power sources and fluid sources directly into the transfer unit. The storage battery provides power, while the air tank and water tank provide fluid supplies, eliminating the accommodating member that generates dust through rubbing.
Solution Approach 2:
The transfer unit achieves operational capability through self-service, carrying integrated power and fluid supplies. The storage battery powers the holding portion moving mechanism, while the air tank and water tank supply necessary fluids, all without requiring external wires or pipes that would generate dust when accommodated.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Prevents contamination of clean rooms by suppressing dust generation during the transfer of workpieces to processing units, ensuring a cleaner environment.
Implementation Method 1
a suction mechanism that causes a suction force to act on the holding portion
Implementation Method 2
a storage battery for supplying the electric power to the holding portion moving mechanism
Implementation Method 3
an ultraviolet irradiation unit that irradiates water recovered from the water reservoir with ultraviolet rays
Implementation Method 4
an ion exchange unit that subjects water discharged from the ultraviolet irradiation unit to ion exchange
Data Source
AI summary
A transfer unit of a transfer apparatus includes a battery that is a power source of respective components, a suction mechanism that is a suction source of a transfer pad, a release mechanism that is an air source of the transfer pad, and a water supply mechanism that causes circulation of water stored in a water reservoir, which are all provided inside a housing of the transfer unit. This eliminates the need to externally supply the transfer unit with electric power, water, and air, and hence, the transfer unit does not include wires and pipes that are routed externally from the transfer unit and an accommodating member for accommodating the wires and pipes. Consequently, generation of dust due to rubbing between the accommodating member and the wires and pipes can be suppressed.