Self-Correcting Solid Immersion Lens for Microscopy Alignment
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Solution Overview
Problem
Existing optical microscopy systems using solid immersion lenses (SIL) face challenges in aligning the SIL with the sample surface, particularly when dealing with uneven or irregular surfaces, as they require tilting the sample or sample holder, which can be complicated and may damage connected wires or not effectively compensate for surface irregularities.
Innovation Solution
The SIL is designed to freely tilt within a cavity in the SIL housing, allowing it to align perpendicular to the sample surface without tilting the sample or optics, using a resilient element like springs or a gas bearing to maintain alignment and enable frictionless movement, ensuring the optical axis remains aligned with the sample.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If the sample or sample holder is tilted to align with the SIL optical axis, then alignment is achieved, but the system complexity increases and wires connected to the sample may be damaged
Solution Approach 1:
Instead of tilting the sample holder to align with the SIL optical axis, the invention inverts the approach by allowing the SIL to tilt within its housing to match the sample surface orientation. This reverses which component is fixed and which is adjustable, eliminating the need to tilt the entire sample holder and its connected wires while achieving the same alignment goal
Solution Approach 2:
The invention segments the alignment function by separating the SIL from its housing, allowing the SIL to independently tilt within the housing cavity. This segmentation enables the SIL to self-align to the sample surface without requiring the entire sample holder assembly to be tilted, thus reducing system complexity and protecting connected wires
2Stability of the object's composition
If the SIL is fixedly attached to the housing, then structural stability is improved, but the ability to accommodate surface irregularities is reduced
Solution Approach 1:
The invention transforms the static, fixed attachment of the SIL to the housing into a dynamic configuration where the SIL can freely tilt within the housing cavity. This dynamic capability allows the SIL to adapt to varying sample surface orientations while maintaining structural stability through the housing constraints and resilient biasing elements
3Manufacturing precision
If force is applied to press the SIL against the sample, then the air gap is eliminated, but the risk of damaging the sample increases
Solution Approach 1:
The invention replaces direct mechanical contact and high force application with a resilient biasing mechanism using springs or elastic elements. These elements apply gentle, controlled force to maintain SIL-sample contact and eliminate air gaps without risking sample damage, substituting aggressive mechanical pressing with a more compliant mechanical system
4Manufacturing precision
If liquid such as oil is placed between the sample and SIL, then the air gap is eliminated, but contamination and cleanup requirements increase
Solution Approach 1:
The invention enables the optical system to achieve proper SIL-sample contact through self-adjusting mechanical means (resilient biasing elements that automatically apply force) and geometric design (conical SIL fitting into a cavity with matching angle), eliminating the need for external liquids like oil. The system serves itself by using controlled atmospheric pressure and precise mechanical geometry to maintain contact without contamination
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This design allows for precise alignment of the SIL with the sample surface, maintaining optical axis alignment and accommodating surface irregularities, enhancing the ability to inspect and test semiconductor devices by ensuring the SIL conforms to the sample's surface without mechanical complications.
Implementation Method 1
a gas inlet configured to deliver gas to the cavity and form a gas bearing to enable frictionless tilting of the SIL within the cavity
Implementation Method 2
The resilient element may comprise, e.g., a supporting ring connected to the SIL housing with springs and being urged by the springs against the rear surface of the SIL
Data Source
AI summary
An optics arrangement for a solid immersion lens (SIL) is disclosed. The arrangement enables the SIL to freely tilt. The arrangement includes a SIL having an optical axis extending from an engaging surface and a rear surface of the SIL; a SIL housing having a cavity configured to accept the SIL therein while allowing the SIL to freely tilt within the cavity, wherein the cavity includes a hole positioned such that the optical axis passes there-through, to thereby allow light collected by the SIL to propagate to an objective lens; and, a SIL retainer attached to the SIL housing and configured to prevent the SIL from exiting the cavity.