Self-Forming Gap in Programmable Resistive Memory Cell

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Solution Overview

Problem

Manufacturing phase change memory devices with small dimensions is challenging due to thermal conductivity issues, as heat generated by the current is conducted away by surrounding structures, slowing down the phase transition process and requiring high reset currents.

Innovation Solution

A method is developed to form thermally isolating gaps between the active region of the phase change material and adjacent dielectric material using a shrinkable porous dielectric material that shrinks away from the memory material upon heating, creating a self-aligned gap that confines heat and reduces the energy required for phase changes.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Use of energy by moving object

If the size of the phase change material element and contact area are reduced to achieve lower reset current, then the reset current magnitude is reduced, but the thermal conductivity of surrounding structures conducts heat away more effectively, slowing down the phase transition process

Engineering Contradiction:
Improvereset current magnitudeVSAvoidphase transition speed
Core Design Contradiction:
Use of energy by moving objectVSSpeed

Solution Approach 1:

A porous dielectric material is introduced as an intermediary layer between the phase change material and the surrounding structures. This porous layer acts as a thermal insulator that mediates the heat transfer, reducing heat conduction to the surroundings while allowing the phase transition process to proceed efficiently with lower current magnitudes.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The patent utilizes a porous dielectric material surrounding the phase change material element. The porous structure provides thermal insulation by trapping air or vacuum within the pores, reducing thermal conductivity. This allows the phase change material to retain heat more effectively, enabling faster phase transitions with lower reset current magnitudes.

Inventive Principle:
Principle #31Porous materials

2Loss of energy

If thermally insulating barriers are formed around the phase change material to reduce heat conduction, then the phase transition efficiency is improved, but the manufacturing process becomes difficult and unreliable with poor positioning accuracy

Engineering Contradiction:
Improveheat conduction lossVSAvoidvoid positioning accuracy
Core Design Contradiction:
Loss of energyVSManufacturing precision

Solution Approach 1:

The porous dielectric material is designed to automatically form the thermal insulating barriers during the manufacturing process without requiring additional complex steps. The material self-organizes to surround the phase change material element, creating the insulating structure in-situ. This self-service approach eliminates the need for difficult and unreliable void formation processes while achieving accurate positioning.

Inventive Principle:
Principle #25Self-service

Solution Approach 2:

The porous dielectric material is prepared and positioned beforehand during the manufacturing process, before the phase change material is fully assembled. This preliminary action ensures that the thermal insulating barriers are already in place and correctly positioned, eliminating the need for subsequent complex void formation steps and ensuring manufacturing reliability.

Inventive Principle:
Principle #10Preliminary action

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach effectively isolates heat, reducing the energy needed for phase transitions and improving the reliability and efficiency of phase change random access memory (PCRAM) devices, enabling their use in large-scale integrated circuits.

Implementation Method 1

the gap is formed by heating the memory material so that porous dielectric material shrinks away from the memory material

Methodology Applied
Scientific EffectThermal contraction: Thermal Contraction

Implementation Method 2

The gap thermally isolates the active portion of the memory material from adjacent shrinkable material

Methodology Applied
Scientific EffectThermal insulation: Thermal Insulation

Implementation Method 3

heat generated by the current through the material

Methodology Applied
Scientific EffectJoule heating: Joule Heating

Data Source

PatentUS7879692B2Programmable resistive memory cell with self-forming gap
Publication Date: 2011.02.01 MACRONIX INTERNATIONAL CO LTD
  • US7879692B2 patent drawing
  • US7879692B2 patent drawing
  • US7879692B2 patent drawing

AI summary

A memory device has a first electrode, a second electrode, and memory material defining an inter-electrode current path between the first electrode and the second electrode. A gap is formed by shrinkage of the shrinkable material between the memory material and a shrinkable material next to the memory material.