Self-Locking Kinematic Coupling for Repeatable Clean Loading
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Solution Overview
Problem
Traditional kinematic couplings with compliant assemblies in semiconductor manufacturing are not repeatable due to their sensitivity to initial load settings, and existing locking mechanisms require manual operation, which can introduce particles into vacuum chambers.
Innovation Solution
A kinematic coupling apparatus comprising an upper and lower member with a spring and a base member, where the spring applies a compressive force to prevent lateral movement in the unloaded state and allows movement in the loaded state, eliminating the need for manual locking and maintaining a clean environment.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a locking mechanism is used to constrain lateral motion of the compliant interface during loading, then placement repeatability is improved, but manual operation is required which can introduce particles into the vacuum chamber
Solution Approach 1:
The spring mechanism automatically transitions the coupling from rigid to compliant state when load is applied, eliminating the need for manual locking operations. The spring's elastic deformation under load naturally releases the lateral motion constraint, allowing the system to self-regulate without human intervention and prevent particle generation in the vacuum chamber.
Solution Approach 2:
The system changes its mechanical state parameter from rigid to compliant based on the applied load. When unloaded, the spring maintains a rigid state with constrained lateral motion for precise placement. When loaded, the spring deforms elastically, transitioning the system to a compliant state that allows lateral motion, thus adapting the system's mechanical properties to operational conditions.
2Strength
If the spring free length is equal to the pin length, then the pin contacts the seat in the loaded state, but this prevents the formation of a gap needed for lateral movement
Solution Approach 1:
The spring free length parameter is specifically designed to be greater than the pin length, creating a controlled gap when the spring is compressed under load. This parameter change enables the system to maintain pin-seat contact for force transmission while simultaneously allowing relative lateral movement between the upper and lower members, achieving both strength and adaptability.
3Reliability
If a traditional kinematic coupling with rigid interfaces is used, then placement repeatability is high, but the compliant interface of the isolator assembly cannot be fully utilized
Solution Approach 1:
The coupling system dynamically transitions between rigid and compliant states based on operational conditions. In the unloaded state, the rigid configuration ensures precise and repeatable placement. In the loaded state, the spring deformation enables the compliant interface to function, allowing lateral motion for vibration isolation. This dynamic adaptation allows the system to achieve both high placement repeatability and effective vibration isolation.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The apparatus ensures repeatable and automatic transition between rigid and compliant states without manual intervention, maintaining a clean environment by trapping particles within the assembly.
Implementation Method 1
The spring may have a free length that is less than the length of the pin. In the unloaded state, the free end of the pin may contact the seat and the spring may apply a compressive force to prevent relative lateral movement between the upper member and the lower member.
Implementation Method 2
In the loaded state, the load may apply a tensile force to the spring that may form a gap between the free end of the pin and the seat, which may allow relative lateral movement between the upper member and the lower member.
Data Source
AI summary
An apparatus includes an upper member, a lower member disposed beneath the upper member, and a spring disposed between the upper member and the lower member. The upper member has a pin extending downward therefrom. The lower member has a seat configured to receive a free end of the pin. The spring surrounds the pin, and has a free length that is less than the length of the pin. In an unloaded state, the free end of the pin contacts the seat and the spring applies a compressive force to prevent relative lateral movement between the upper member and the lower member. When the lower member carries a load in a loaded state, the load applies a tensile force to the spring that forms a gap between the free end of the pin and the seat, which allows relative lateral movement between the upper member and the lower member.