Self-Regenerating Reaction By-Product Trapping Apparatus

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Solution Overview

Problem

The existing reaction by-product trapping apparatuses in semiconductor manufacturing processes have a limited use duration due to reaction by-products accumulating on trapping plates, necessitating frequent replacement or cleaning, which delays and costs the manufacturing process.

Innovation Solution

A self-regenerating reaction by-product trapping apparatus with regeneration heaters installed on the inner collecting tower, capable of heating and removing reaction by-products, allowing for additional trapping reactions without replacement, extending the apparatus's use duration.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If the trapping apparatus operates continuously to trap reaction by-products, then the trapping efficiency is maintained, but the reaction by-products accumulate on the inner collecting tower trapping plates, limiting the use duration

Engineering Contradiction:

Improvetrapping efficiencyVSAvoiduse duration

Core Design Contradiction:

ProductivityVSDuration of action of moving object

Solution Approach 1:

The patent implements periodic action by alternating between trapping operation mode and regeneration operation mode. The control unit automatically switches between these modes based on operational timing or trapping saturation detection, enabling the apparatus to maintain continuous productivity while periodically removing accumulated reaction by-products from the inner collecting tower trapping plates through heating

Inventive Principle:

Principle #19Periodic action

Solution Approach 2:

The patent applies parameter changes by controlling the heating temperature of the regeneration heater to reach a specific range (300-500°C) that enables the decomposition and removal of reaction by-products from the trapping plates. This temperature parameter change transforms the trapped substances into a removable state, extending the apparatus use duration without sacrificing trapping efficiency

Inventive Principle:

Principle #35Parameter changes

2Reliability

If the trapping apparatus is replaced with a new apparatus when the inner collecting tower is saturated, then the trapping performance is restored, but the semiconductor manufacturing process is delayed and manufacturing costs increase

Engineering Contradiction:

Improvetrapping performanceVSAvoidmanufacturing process delay

Core Design Contradiction:

ReliabilityVSLoss of time

Solution Approach 1:

The patent implements self-service through the automatic regeneration function where the control unit autonomously detects when the trapping plates are saturated and activates the regeneration heater to clean them in place. This self-regenerating capability eliminates the need for manual replacement of the entire trapping apparatus, maintaining reliable trapping performance while preventing manufacturing process delays and reducing costs

Inventive Principle:

Principle #25Self-service

3Ease of manufacture

If the inner collecting tower is cleaned by manual disassembly and reassembly, then the reaction by-products are removed, but the operation complexity and time consumption increase

Engineering Contradiction:

Improvecleaning operationVSAvoidcleaning time

Core Design Contradiction:

Ease of manufactureVSLoss of time

Solution Approach 1:

The patent replaces the mechanical manual cleaning process with a thermal field-based automatic regeneration system. The control unit activates the regeneration heater to thermally decompose and remove reaction by-products from the trapping plates without requiring manual disassembly or reassembly, significantly reducing operation complexity and time consumption while maintaining effective cleaning

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The apparatus regenerates the inner collecting tower by removing reaction by-products through heating, enabling continuous operation and extending the use duration of the trapping apparatus, thus improving manufacturing efficiency and reducing costs.

Implementation Method 1

a heater configured to heat exhaust gas introduced into a housing to trap and discharge a reaction by-product contained in the exhaust gas

Methodology Applied

Scientific EffectHeating: Heating

Implementation Method 2

regeneration heaters installed on the inner collecting tower and configured to remove the reaction by-product through a heating reaction

Methodology Applied

Scientific EffectHeating: Heating

Implementation Method 3

remove the reaction by-product through a heating reaction

Methodology Applied

Scientific EffectThermal decomposition: Pyrolysis

Data Source

PatentUS11623175B1Apparatus for trapping of reaction by-product having self regenerating function for used inner collecting tower

Publication Date: 2023.04.11 MILAEBO

AI summary

The present disclosure provides an apparatus for trapping of a reaction by-product having a self regenerating function for a used inner collecting tower, and an object of the present disclosure is to provide the reaction by-product trapping apparatus configured such that the trapping apparatus positioned between a process chamber and a vacuum pump or between the vacuum pump and a scrubber stops operating during a semiconductor manufacturing process when a trapping reaction of trapping a reaction by-product reaches a saturated state during a trapping operation, and the trapping apparatus removes the reaction by-product produced in an inner collecting tower through a heating reaction, such that the inner collecting tower is regenerated to enable an additional trapping reaction to be performed.