SEM Chamber Camera Zoom Control for Specimen Lift Positioning
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Solution Overview
Problem
Existing charged particle beam apparatuses, such as scanning electron microscopes, face challenges in accurately determining the spatial relationship between the specimen unit and the objective lens during the ascending process, due to limited display magnification and brightness issues in camera images.
Innovation Solution
A charged particle beam apparatus with a camera that captures real-time images of the specimen chamber, and a controller that automatically increases the display magnification of the camera image when the specimen unit reaches a predetermined height relative to the objective lens, allowing for enhanced visualization of the specimen unit's position and attitude.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Area of stationary object
If small display magnification is used for camera image, then the entire specimen chamber can be viewed, but it becomes difficult to correctly specify the spatial relationship between the structure and the specimen unit
Solution Approach 1:
The display magnification is dynamically adjusted based on the vertical position of the specimen unit. When the specimen unit is far from the objective lens, small magnification is used to show the entire chamber. When the specimen unit approaches the objective lens, magnification is automatically increased to enhance visibility of the spatial relationship, resolving the contradiction between field of view and measurement precision.
Solution Approach 2:
The display magnification parameter is changed according to the vertical position parameter of the specimen unit. By linking these two parameters, the system automatically selects appropriate magnification levels, allowing the user to specify spatial relationships accurately when needed while maintaining broad overview when the specimen is at lower positions.
2Shape
If glossy metal materials are used for housing and specimen holder, then aesthetic appearance is improved, but the camera image exhibits brightness or halation over the entire image
Solution Approach 1:
The patent applies a matte finish or anti-reflective coating to the housing and specimen holder surfaces. This changes the optical properties of the glossy metal materials, reducing specular reflection and halation in camera images while preserving the aesthetic appearance of the metal components.
3Reliability
If real-time camera monitoring is implemented during ascending process, then collision risk is reduced, but display magnification is insufficient to clearly show spatial relationships
Solution Approach 1:
The system implements dynamic magnification adjustment during the ascending process. As the specimen unit moves upward toward the objective lens, the display magnification automatically increases, enabling clear recognition of spatial relationships in real-time and improving both collision avoidance reliability and positional relationship recognition accuracy.
Solution Approach 2:
The system provides visual feedback through the camera image with dynamically adjusted magnification. When the specimen unit approaches the objective lens, the increased magnification allows the user to observe the approaching distance and make timely adjustments, creating a feedback loop that improves both safety and precision.
Data Source
AI summary
During an ascending process of a specimen unit, a camera image including a height guide is displayed. A display magnification controller increases a display magnification of the camera image in response to a representative height of the specimen unit having reached a magnification changing height. A protrusion amount computing unit computes a protrusion amount of a specimen from a specimen holder based on a height of the specimen holder at the time of accepting registration operation.