Automated SEM Contour Alignment for Micro-Electronic Structural Evaluation
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Solution Overview
Problem
The manual alignment of actual structural elements in micro-electronic devices is time-consuming and not very accurate, leading to performance limitations due to variations in dimensions, and existing methods for evaluating microscopic structural elements are inefficient.
Innovation Solution
A method that involves detecting the actual structural element contour using a scanning electron microscope image, aligning it with a simulated contour obtained by simulating a lithographic process responsive to a design contour, and comparing the aligned contour with reference information, utilizing a computer program product and system with a processor and memory unit to automate the process.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If manual alignment is used to align actual structural element with design structural element, then alignment can be performed, but it is time-consuming and not very accurate
Solution Approach 1:
The patent replaces manual mechanical alignment operations with an automated computer-based system that uses image processing and pattern recognition algorithms to detect, align, and measure structural elements automatically, eliminating manual intervention while improving both speed and accuracy
Solution Approach 2:
The system enables self-alignment through automated detection and comparison processes where the computer automatically identifies the actual structural element, compares it with the design element, performs alignment calculations, and generates measurements without requiring manual alignment operations
2Measurement precision
If detailed evaluation of microscopic structural elements is performed, then measurement accuracy is improved, but the process becomes complex and time-consuming
Solution Approach 1:
The patent replaces complex manual evaluation processes with automated computer-based image processing and analysis systems that handle the complexity of detailed microscopic structural element evaluation through algorithmic processing, reducing both operational complexity and time requirements while maintaining high measurement precision
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach provides fast, automatic, and highly reliable evaluation of structural elements, enabling efficient alignment and comparison, thereby overcoming the limitations of manual alignment and improving the accuracy of structural element evaluation.
Implementation Method 1
obtaining a scanning electron microscope image of an actual structural element
Data Source
AI summary
A method, a system and a computer program product for evaluating an actual structural element of an electrical circuit. The method includes: detecting an actual structural element contour by processing a scanning electron microscope image of the actual structural element; aligning the actual structural element contour with a simulated contour to provide an aligned actual structural element contour; wherein the simulated contour is obtained by simulating a lithographic process that is responsive to a design contour; and comparing between the aligned actual structural element contour and reference information.