SEM Cross-Section Matching for Automated Structure Detection
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Solution Overview
Problem
In charged particle beam apparatuses, such as those using focused ion beams, operators require significant skill and time to detect specific structures on sample cross-sections, necessitating automated processing to improve efficiency and precision.
Innovation Solution
A charged particle beam apparatus with an image identity degree determination unit and a post-determination processing unit that automatically detects specific structures by comparing SEM images to registered criterion images, allowing for automated processing and reduced processing time.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If high-resolution scanning is performed to detect specific structures, then measurement precision is improved, but processing time increases
Solution Approach 1:
The patent applies preliminary action by performing low-resolution scanning first to locate regions containing specific structures, then performing high-resolution scanning only on those identified regions. This preliminary localization step avoids the need for full high-resolution scanning of the entire sample, thereby reducing processing time while maintaining measurement precision for the structures of interest.
2Productivity
If automated processing is implemented, then productivity is improved, but device complexity increases
Solution Approach 1:
The patent implements feedback by using the results of low-resolution scanning to dynamically control and adjust the high-resolution scanning process. The system automatically feeds back the locations of detected structures to guide subsequent high-resolution imaging, enabling automated processing without requiring complex manual intervention or overly sophisticated equipment.
3Measurement precision
If operator skill is increased to detect structures, then measurement precision is improved, but ease of operation deteriorates
Solution Approach 1:
The patent applies self-service by enabling the system to automatically perform structure detection and identification without relying on operator expertise. The automated image processing and structure recognition algorithms independently analyze the scanned images to identify specific structures, eliminating the need for operators to possess specialized detection skills while maintaining high measurement precision.
Data Source
AI summary
Automated processing is provided. A charged particle beam apparatus includes: an image identity degree determination unit determining whether an identity degree is equal to or greater than a predetermined value, the identity degree indicating a degree of identity between a processing cross-section image that is an SEM image obtained through observation of a cross section of the sample by a scanning electron microscope, and a criterion image that is the processing cross-section image previously registered; and a post-determination processing unit performing a predetermined processing operation according to a result of the determination by the image identity degree determination unit.