Scanning Electron Microscope Disc Reflecting Layer Photon Leakage
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Solution Overview
Problem
Conventional scanning electron microscopes are inefficient due to secondary electrons leaking through the disc's through-hole, reducing the collection and amplification of photons generated in the scintillator layer.
Innovation Solution
A scanning electron microscope design featuring a disc with a tapered through-hole having a reflecting layer at its inner peripheral surface to reflect and guide photons inward, combined with a scintillator layer for photon generation and a protective layer to prevent static electricity, enhancing photon collection and amplification efficiency.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If a through-hole is provided in the disc for electron beam passage, then electron beam transmission is enabled, but photons generated in the scintillator layer leak through the through-hole reducing detection efficiency
Solution Approach 1:
A reflecting layer is introduced as an intermediary substance on the inner peripheral surface of the through-hole to redirect photons that would otherwise leak out. This mediator converts harmful photon leakage into useful photon guidance toward the light guide, resolving the contradiction between maintaining electron beam transmission and preventing photon loss.
Solution Approach 2:
The solution converts the harmful effect of photon leakage through the through-hole into a beneficial effect by using the reflecting layer to redirect these photons toward the light guide. The previously wasted photons now contribute to the detection signal, transforming a disadvantage into an advantage.
2Ease of operation
If the through-hole has a large diameter to facilitate electron beam passage, then electron beam transmission is improved, but the area for photon collection is reduced
Solution Approach 1:
The solution addresses the area trade-off by utilizing the vertical dimension through the tapered geometry of the through-hole. The reflecting layer on the tapered inner surface redirects photons in the radial dimension toward the light guide, effectively compensating for the reduced collection area caused by the large diameter required for electron beam passage.
3Productivity
If a reflecting layer is added to the inner peripheral surface of the through-hole, then photon collection efficiency is improved, but device complexity increases
Solution Approach 1:
The reflecting layer is applied locally only to the inner peripheral surface of the through-hole where photons are most likely to leak, rather than coating the entire disc. This localized application minimizes the increase in device complexity while maximizing the benefit to photon collection efficiency in the critical region.
4Productivity
If the inner peripheral surface of the through-hole is tapered, then photon guidance is improved, but manufacturing precision requirements increase
Solution Approach 1:
The tapered geometry of the through-hole changes the spatial parameters of photon propagation paths, directing photons toward the light guide. While this improves photon guidance efficiency, it does increase manufacturing precision requirements for achieving the correct taper angle and surface finish to ensure optimal photon reflection and guidance.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution effectively prevents photon leakage and enhances photon guidance, improving the efficiency of photon collection and amplification, leading to better imaging capabilities in scanning electron microscopes.
Implementation Method 1
a scintillator layer on a surface thereof, the scintillator layer configured to generate photons based on secondary electrons received from the sample
Implementation Method 2
the though-hole includes, at an inner peripheral surface thereof, a reflecting layer configured to reflect the received photons
Data Source
AI summary
Example embodiments are directed to a scanning electron microscope. The scanning electron microscope includes an electron gun to configured irradiate an electron beam on a sample, and a disc of a transparent material and including a through-hole through which the electron beam passes. The disc includes a scintillator layer formed at a surface thereof so as to generate photons based on the secondary electrons received from the sample. A reflecting layer is formed at an inner peripheral surface of the through-hole so as to reflect the photons, thereby preventing leakage of the photons via the through-hole.