SEM-EDS Holder for Thin Filter Samples
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Solution Overview
Problem
Existing SEM-EDS systems damage thin filter samples during mounting and detaching, making reanalysis difficult, and often detect components of the holder instead of the sample, degrading analysis reliability.
Innovation Solution
An SEM-EDS holder device with a cylindrical main body, disc, and sample holder parts made of non-magnetic conductive materials like beryllium or beryllium copper alloys, using mechanical fixing methods instead of carbon tape or silver paste, allowing selective material replacement and minimizing interference with EDS detection.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If carbon tape or silver paste is used to attach the sample to the SEM holder, then the sample can be fixed to the holder, but the sample is damaged and cannot be reused
Solution Approach 1:
The patent replaces the chemical attachment method (carbon tape/silver paste) with a mechanical fixing system consisting of a holder body with through-holes and a sample holder part with clamping structures. This mechanical system allows the sample to be fixed without chemical adhesion, preventing damage to the thin filter sample and enabling reuse.
2Strength
If aluminum holder is used for SEM-EDS analysis, then the holder provides structural support, but the holder components are detected during EDS analysis, degrading analysis reliability
Solution Approach 1:
The patent changes the material parameter of the holder from aluminum to beryllium or beryllium copper alloy. These materials have atomic numbers lower than aluminum and produce fewer characteristic X-rays in the energy range detected by EDS, thereby reducing interference with the chemical component analysis while maintaining the required structural support functionality.
3Ease of operation
If thin filter sample is handled and mounted using conventional methods, then the sample can be positioned on the holder, but the sample is damaged making reanalysis difficult
Solution Approach 1:
The patent introduces a sample holder part as an intermediary component between the thin filter sample and the main holder body. This sample holder part provides a gentle mounting interface with through-holes that allow the sample to be positioned and secured without direct contact with the rigid holder structure, preventing damage to the fragile thin filter sample during handling and mounting.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The device minimizes sample damage, enables reanalysis, and reduces errors in chemical component detection by preventing holder components from being detected, ensuring accurate analysis of the sample's natural chemical components.
Implementation Method 1
an energy dispersive X-ray spectroscope (EDS) refers to a kind of spectrometer that detects characteristic X-rays, which are emitted by an interaction between electron beams and the sample
Data Source
AI summary
The present disclosure relates to an SEM-EDS analysis holder device configured to fix a sample in an SEM-EDX analysis apparatus. More specifically, the present disclosure relates to an SEM-EDS analysis holder device capable of minimizing damage to a sample and reusing the sample. An object of the present disclosure is to provide an SEM-EDS analysis holder device capable of minimizing damage to a sample and reusing the sample in an SEM-EDX analysis apparatus configured by attaching an energy dispersive X-rays spectroscope (EDS) detector to scanning electron microscopy (SEM). Another object of the present disclosure is to provide an SEM-EDS analysis holder device that is easily attached or detached and includes chemical components detected by an EDS detector without a component of a holder.