Scanning Electron Microscope Error Image Retrocession
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Conventional scanning electron microscopes face challenges in analyzing execution errors during automatic observation processes, as they require reproducing the error conditions using the sample, apparatus, recipe, and operator, which is labor-intensive and time-consuming, and existing solutions like JP-A-2003-17378 do not adequately record error details, hindering efficient error analysis.
Innovation Solution
A scanning electron microscope with image generation, storage, and recording capabilities that successively store and overwrite sample images, allowing for error image recording and playback, enabling analysis of errors without reproducing the error conditions, thereby reducing labor and facilitating rapid error confirmation.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If conventional error analysis methods are used (reproducing error conditions with sample, apparatus, recipe, and operator), then error analysis can be conducted, but labor and time consumption increase significantly
Solution Approach 1:
The system performs preliminary recording of sample images and process parameters during normal operation before errors occur. When an error is detected, the pre-recorded data is immediately available for analysis, eliminating the need to reproduce error conditions and significantly reducing analysis time while maintaining reliability
Solution Approach 2:
Instead of reproducing the original error conditions physically (using sample, apparatus, recipe, and operator), the system creates and analyzes copies of the actual error state through recorded images and parameter data. This digital copying approach preserves error analysis accuracy while eliminating time-consuming reproduction efforts
2Loss of information
If sample images are continuously recorded during automatic observation process, then error details can be captured, but storage requirements and data processing burden increase
Solution Approach 1:
The system extracts and stores only the essential error-related information (sample images and key process parameters) when errors occur, rather than continuously storing all operational data. This selective extraction captures necessary error details while minimizing storage requirements and data processing burden
Solution Approach 2:
The recording system applies different quality levels to different data: full-resolution images are stored only for error conditions, while normal operation uses reduced recording. This local quality approach ensures error detail information is preserved without proportionally increasing overall data volume
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables efficient analysis of errors by recording and replaying error images, reducing the need for repetitive experiments and allowing for detailed confirmation of error causes, thus streamlining the error analysis process.
Implementation Method 1
a scanning electron microscope which detects a signal generated from a sample by scanning irradiation of an electron beam
Data Source
AI summary
It is facilitated in a scanning electron microscope to save the labor of executing the reproduction test, conduct basic analysis on a problem caused in execution of the automatic observation process, and confirm details resulting in the error. Upon detecting an error from an abnormality, the scanning electron microscope extracts a sample image Im(t2) obtained by retroceding from a sample image Im(te) stored so as to be associated with time te of error occurrence by a predetermined video quantity (for example, total recording time period t2) previously set and registered by an input-output device, from sample images stored in a recording device while being overwritten, and stores a resultant sample image in another recording device.