SEM Image Hub Storage for Real-Time Distributed Inspection
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Solution Overview
Problem
Current charged particle beam inspection systems face challenges in high-resolution imaging and efficient data storage and management, particularly for sub-100 nanometer IC components, due to limitations in optical microscopes and the need for multiple SEM tools with separate storage and data management systems, which are costly and not suitable for real-time analysis.
Innovation Solution
A distributed image recording and storage system that utilizes a data center with an image hub server to store and manage images from multiple scanning charged particle microscope tools, allowing for real-time data transfer and analysis across a network, even in low-bandwidth environments, and enabling shared storage and management to reduce costs and increase throughput.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Manufacturing precision
If multiple SEM tools with separate storage systems are used to achieve high-resolution imaging of sub-100 nanometer IC components, then manufacturing precision is improved, but device complexity and cost increase
Solution Approach 1:
The patent consolidates storage resources from multiple SEM tools into a single shared storage system. Images from multiple SEM tools are stored in a common storage infrastructure rather than separate storage systems, reducing overall system complexity while maintaining the ability to achieve high-resolution imaging across all tools.
Solution Approach 2:
The shared storage system serves multiple SEM tools simultaneously, providing a universal storage infrastructure that can handle images from any connected SEM tool. This multi-functional approach eliminates the need for dedicated storage systems for each individual tool, reducing device complexity while preserving inspection capabilities.
2Manufacturing precision
If multiple SEM tools with separate storage systems are deployed to achieve high-resolution imaging, then manufacturing precision is improved, but cost increases
Solution Approach 1:
By merging storage resources into a shared infrastructure, the patent reduces redundant hardware purchases. Multiple SEM tools share common storage capacity, networking, and management systems, significantly lowering the total cost of ownership while maintaining high-resolution imaging capabilities across all tools.
Solution Approach 2:
The universal shared storage system provides cost-effective access to high-resolution imaging capabilities for multiple SEM tools. Instead of each tool requiring expensive dedicated storage, the system allows resource sharing that reduces overall procurement and operational costs while maintaining precision inspection standards.
3Adaptability or versatility
If images are stored in distributed separate storage systems, then adaptability to different SEM tools is improved, but data management complexity and time loss increase
Solution Approach 1:
The patent merges multiple distributed storage systems into a unified storage infrastructure with centralized management. This consolidation enables efficient data location and retrieval across all stored images, eliminating the time loss associated with searching through multiple separate storage systems while maintaining compatibility with various SEM tools through standardized interfaces.
4Adaptability or versatility
If separate storage systems are used for each SEM tool, then adaptability to different tools is improved, but productivity decreases due to inefficient data access
Solution Approach 1:
The shared storage system merges data access capabilities across all SEM tools into a single efficient infrastructure. Images from any tool can be rapidly retrieved and analyzed without the overhead of navigating multiple separate storage systems, significantly improving inspection throughput and productivity while maintaining compatibility with different tool types.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution enables high-speed, real-time image analysis and storage for multiple SEM tools, reducing costs and improving inspection efficiency, even in limited network bandwidth conditions, by centralizing data management and allowing for shared resources, thus enhancing the overall yield of IC production.
Implementation Method 1
transfer the first image from the first storage to the application for inspection analysis of the first image
Data Source
AI summary
Apparatuses, systems, and methods for distributed image recording and storage for charged particle tools are provided. In some embodiments, a system may include a first storage of a data center, the first storage configured to store a plurality of images acquired from a plurality of scanning charged particle microscope (SCPM) tools; an image hub server of the data center, the image hub server configured to: receive a first query from an application for a location of a first image generated by a first SCPM tool of the plurality of SCPM tools; determine that the location of the first image is the first storage; and transfer the first image from the first storage to the application for inspection analysis of the first image.